Rotary Servo Table features 42 mm profile.

Press Release Summary:




Measuring 200 mm in diameter, direct drive Planar ServoRing PSR-200 features 40 mm clear center aperture that can be used for air or wire line feed-through or beam delivery. Unit provides peak torque of 45 Nm with 0.2 arc-sec resolution, 0.5 arc-sec repeatability, and 5 arc-sec accuracy. Motor and encoder are directly coupled to eliminate backlash, and precision ball bearings maximize performance with respect to wobble, moment stiffness, and friction.



Original Press Release:



Low Profile Rotary Servo Table PSR-200



DIRECT DRIVE ROTARY SERVO TABLE

Planar ServoRing PSR-200 features low profile and large center aperture

The compact design of the Planar ServoRing PSR-200 rotary stage was optimized to lower stage profile to 42 mm to reduce total system working height. Precision ball bearings are used to maximize performance with respect to wobble, moment stiffness and friction. Planar ServoRing PSR-200 stage has large clear center aperture 40 mm (55 mm option) that can be used for air or wire line feed-through or beam delivery

Brushless Direct Drive maximizes dynamic performance of the PSR-200 stage by utilizing three phase planar direct drive servo motor technology. Lo-Cog magnetic design assures smooth rotation and dynamic performance

Accurate Positioning is assured using high resolution encoder with sub arc-sec positioning performance. The motor and rotary encoder are directly coupled to eliminate backlash. The low inertia and zero backlash make PSR-200 the ideal solution for applications requiring frequent start-stop moves or constant velocity scanning

Specifications

o peak torque 45 Nm

o stage height 42 mm

o stage diameter 200 mm

o stage center opening 55 mm

o resolution 0.2 arc-sec

o repeatability 0.5 arc-sec

o accuracy 5 arc-sec

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