Qcept Technologies Receives Order for ChemetriQ 5000 Non-Visual Defect Inspection System for 2X-nm and 1X-nm Process Development and Integration
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ATLANTA - Qcept Technologies Inc. today announced that it has received an order for its ChemetriQ® 5000 non-visual defect (NVD) inspection system from a leading semiconductor technology innovator headquartered in North America. The ChemetriQ® 5000 system will be used to support the company's unit process development and process integration activities for advanced nodes, including 2X-nm and 1X-nm logic for both front-end-of-line and back-end-of-line processes.
Applying the ChemetriQ 5000 for unit process development and process integration provides fab engineers with "new eyes" on the surface characteristics of the wafer after a single process step, as well as on how the surface characteristics evolve through an integrated process flow. Additionally, leading-edge fabs are encountering yield-loss issues in manufacturing that do not match any physical defect data. NVD inspection enables fabs to detect and help identify the source of these "no defect found" issues in order to develop more robust processes earlier in the development cycle.
"The ability of the ChemetriQ 5000 to inspect any wafer at any layer at any time without requiring a change in recipe makes it uniquely suited for the type of advanced process development and integration work that this customer is doing," stated Robert Newcomb, executive vice president of Qcept Technologies. "This latest order-from one of the world's leading developers of advanced semiconductor processes-demonstrates the growing acceptance of NVD inspection as an enabling solution, not only for high-volume manufacturing but also for next-generation process development. We look forward to continuing our work with this customer and its partners to take full advantage of the benefits of NVD inspection for their leading-edge technology-node programs."
About Qcept Technologies Inc.:
Qcept Technologies delivers wafer inspection solutions for non-visual defect (NVD) detection in advanced semiconductor manufacturing. Qcept's ChemetriQ® platform is being adopted in critical processes for inline, non-contact, full-wafer detection of such NVDs as sub-monolayer organic and metallic residues, process-induced charging, and other undesired surface non-uniformities that cannot be detected by conventional optical inspection equipment. More information can be found at www.qceptech.com.
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Qcept Technologies Inc.
Web Site: www.qceptech.com
