Profiler offers programmable stylus profiling.

Press Release Summary:



Dektak® 8 Advanced Development Profiler, with Low-Inertia Sensor 3 head, provides accurate characterization of MEMS, semiconductors, data storage devices, and other surfaces. It offers dual camera optics; 7.5 angstrom, 1 sigma step height repeatability; and vertical range of up to 1 mm. Overhead gantry allows for long scan roughness, planarity, and flatness measurements on samples up to 200 mm². N-Lite low-force option provides stylus forces as low as 0.03 mg for scratch-free measurements.



Original Press Release:



Veeco Introduces Dektak 8 Advanced Development Profiler; Programmable Stylus Profiling for Demanding Applications



Tucson, AZ, June 11, 2003 - Veeco Instruments has introduced the Dektak® 8 Advanced Development Profiler for research and production surface metrology. The newest Dektak stylus profiler combines high repeatability, low-force tip technology, and advanced 3D data analysis for accurate characterization of MEMS, semiconductors, data storage devices and other surfaces.

"The Dektak 8 Advanced Development Profiler provides flexibility and features that fill both advanced research and production roles," said Anthony Martinez, GM of Veeco's Optical Products. "Advanced tip geometries and low stylus force allow users to characterize challenging features and materials."

Geoff Anderson, Veeco stylus profiler Product Manager added, "The Dektak 8's Low-Inertia Sensor 3 head outperforms all other stylus sensors, with an extremely low noise floor and easy stylus replacement. With industry-leading 3D data analysis, improved dual camera optics for easy operation, and highly repeatable scan positioning, we believe the Dektak 8 provides the best price to performance ratio of any available stylus profiler."

The Dektak 8 provides 7.5 angstrom, 1 sigma step height repeatability and a vertical range of up to 1mm. Its overhead gantry design allows for long scan roughness, planarity and flatness measurements on samples up to 200mm square, in a compact bench top configuration. Windows® XP based Dektak software, and optional Vision software, provide a wealth of 2D and 3D analyses, filters, plots and more, for comprehensive surface characterization.

The N-Lite low force option provides stylus forces as low as 0.03 mg, for scratch-free measurement of soft resists, polymers, metals and films. N-Lite enables the use of super-sharp, 50 nm styli, which can accurately characterize sub-micron lines and spaces. High aspect ratio styli can assess the depth of 10 micron deep by 1.5 micron wide trenches, as well as measuring Shallow Trench Isolation (STI) etch depth.

About Veeco

Veeco Instruments Inc. provides solutions for nanoscale applications in the worldwide semiconductor, data storage, telecommunications/wireless and scientific research markets. Our Metrology products are used to measure at the nanoscale and our Process Equipment tools help create nanoscale devices. Veeco's manufacturing and engineering facilities are located in New York, California, Colorado, Arizona and Minnesota. Global sales and service offices are located throughout the United States, Europe, Japan and Asia Pacific. Additional information on Veeco can be found at www.veeco.com/ File: Dektak 8_ADP.doc

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