Process Metering Pumps suit CO2 wafer cleaning applications.
Press Release Summary:
LEWAtriplex(TM) Monoblock Metering Pumps are capable of handling liquid CO2 in supercritical state at up to 8,000 psi. They incorporate leak-free, sealless, multi-layer, PTFE or metal diaphragms with positive displacement that are never exposed to atmosphere. Pumps are inherently cool-running and can incorporate optional cooling jackets. Additional offerings include triple-throw crankshaft fully immersed in oil, roller bearings, and shock-resistant sleeve bearings
Original Press Release:
Process Metering Pumps for Supercritical CO2 Wafer Cleaning
A full line of diaphragm metering pumps for green chemistry semiconductor wafer cleaning processes involving supercritical CO2 photoresist stripping agents is available from AMERICAN LEWA, INC. of Holliston, Massachusetts.
LEWAtriplex(TM) Monoblock Metering Pumps are capable of handling liquid CO2 in the supercritical state at up to 8,000 psi which lets semiconductor wafer manufacturers clean wafers with minimal surface tension, permitting the development of ever-smaller geometries. Featuring leak-free, sealless diaphragms with positive displacement and low pump head volume, the pumps are inherently cool-running and can incorporate optional cooling jackets.
Designed for smooth operation, LEWAtriplex(TM) Monoblock Metering Pumps have a multi-layer PTFE- or metal diaphragm which is never exposed to atmosphere and a triple-throw crankshaft, fully immersed in oil, to drive all three pump heads. Standard features include roller bearings on both ends for full support and shock-resistant sleeve bearings on the connecting rods.
LEWAtriplex(TM) Monoblock Metering Pumps for CO2 applications are priced from $25,000. Up, depending upon configuration. Literature is available.
For more information contact:
AMERICAN LEWA, INC.
Kenneth P. McQuesten, Sales Manager
132 Hopping Brook Rd. / P.O. Box 6820
Holliston, MA 01746
(888) LEWA123 FAX (508) 429-8615
e-mail: sales@americanlewa.com
www.americanlewa.com
