Pressure Controller suits semiconductor manufacturing.
Press Release Summary:
Dual-Valve Pressure Controller incorporates one upstream and one downstream valve for accurate pressure control in dead-ended applications without using manual bleed valve. Controller modulates proportional valves on source and vent side of process, concurrently. It provides control stability ±0.02% FS, custom pressure-selection range, and quick response time. Controller consumes 50 mA of power and can be configured for low, moderate, and high flow rates.Original Press Release:
Dual Valve Pressure Controller for the Semiconducter Market
Tucson, AZ - Alicat Scientific, Inc. has announced its introduction to the semiconductor market the revolutionary high speed dual valve pressure controller to aid in pressure control during semiconductor manufacturing. The dual valve pressure controller from ASI is a pressure control device that incorporates two control valves, one upstream and one downstream to provide accurate pressure control in dead ended applications without the use of a manual bleed valve. The dual valve pressure control is able to modulate proportional valves on the source and vent side of the process, concurrently, allowing precise pressure control even with changes in supply pressure. The ASI DVPC offers excellent control stability, typically +/- 0.02% of full scale, custom pressure selection range and a response time so fast that its limiting factor is the time required for the process volume to fill through the inlet valve. The ASI DVPC is a low power unit (consuming 50mA typical) and can be configured for low, moderate and high flow rates. All of these in a user configurable package that offers custom pressure range selection at a price that is comparable with other units that offer much less.
The ASI dual valve pressure controller is made with rugged stainless steel components and contains the same technologically advanced features that are built into Alicat Scientifics' line of precision flow measurement equipment, including patented laminar technology. The DVPC comes standard with organic display and real time readout of control settings and pressure on screen, allowing users to see what is happening in real time. The unit can be set locally via the buttons on the unit or full control and communication can be achieved via RS-232 allowing for fast and simple field repairs resulting in reduced downtime. Alicat dual valve pressure controllers can be set up in a "multi-drop" configuration allowing multiple Alicat units to operate together in a single process all communicating independently to single serial port.
About Alicat Scientific, Inc.
Alicat Scientific is a designer and manufacturer of laminar flow based flow instrumentation. ASI has been committed to helping customers grow and succeed in industries such as automotive, biotech, pharmaceutical, process management, packaging, environmental, air conditioning, and a host of other industries. There are currently over 21,000 ASI units in operation around the world with more being used every day. Alicat Scientific manufactures a complete line of flow control and measurement devices that specialize in low flow applications. With ranges of 0.5SCCM to 1500SLPM full scale, turndown ratios of 100:1, user selectable 14 gas configuration, full scale error of +/- 1% and unmatched customer support and service ASI continues to set the standard for the industry. Alicat Scientific, Inc. (www.alicatscientific.com) can often times build custom calibrated instrumentation for mixed or exotic gasses into any of its devices. Alicat Scientific specializes in providing tailor made solutions for applications other instrumentation manufacturers avoid.
