Plasma Cleaning System uses RF and hollow cathode electrode.
Press Release Summary:
Evactron® CombiClean(TM) facilitates control and operation of multiple plasma radical sources for column and desktop cleaning of specimens for electron columns used in SEMs, TEMs, and FIBs. With integrated controller and vacuum chamber, operator can select which PRS is active via system front panel and switch between column cleaning and desktop de-contamination of parts destined for use in microscopes. Dry nitrogen purging prevents back streaming after plasma cleaning and during sample storage.
Original Press Release:
XEI Scientific Launches Evactron® CombiClean(TM) at M&M 2011
Redwood City, CA, - XEI Scientific Inc, manufacturers of more than 1,100 EVACTRON® De-Contaminator Plasma Cleaning Systems for electron microscopes and other vacuum chambers, announces the release of their new Evactron® CombiClean(TM) system which simplifies the control and operation of plasma radical sources for both column and desktop cleaning of specimens for electron columns used in SEMs, TEMs and FIBs.
With over 1,100 Evactron De-Contamination systems in use primarily on electron columns (SEMs, TEMs and FIBs), XEI Scientific is expanding applications of their effective downstream plasma cleaning technology. Earlier this year XEI introduced the Evactron® SoftClean(TM) Chamber which allows users to mount Evactron Plasma Radical Sources (PRS's) onto a desktop vacuum chamber to provide the same effective removal of problematic hydrocarbon contamination from samples, holders and other parts before they are placed in the electron column.
Using RF and a patented hollow cathode electrode, Evactron systems produce a plasma that is contained in the PRS module. Reactive gas radicals are generated and drawn into the sample chamber where they chemically break down unwanted hydrocarbon molecules into smaller constituents which are then easily removed by the instrument's vacuum system.
At the Microscopy and Microanalysis meeting in Nashville, TN on August 7-11 (http://www.microscopy.org/MandM/2011/index.cfm), XEI Scientific will introduce the Evactron CombiClean(TM) System to simplify the control and operation of multiple PRS modules on columns and desktops. With a new integrated controller and vacuum chamber, operators can easily select which PRS is active via the system front panel and seamlessly switch between column cleaning and desktop de-contamination of parts destined for use in the microscopes.
Other benefits include multiple insertion ports for cleaning TEM sample holders. The cleaning chamber may function as a secure, long-term storage container for decontaminated samples. It has a large circular lid for convenient access to insert samples, while dry nitrogen purging prevents back streaming after plasma cleaning and during sample storage to allow the use of rotary vane pumps. Attractively priced and with a small footprint, this new cleaning solution continues the nearly 20 year tradition established by XEI of providing cost effective and innovative solutions to improve the performance of electron and ion imaging tools.
For more information on how to improve the image quality in electron or ion microscopes, please visit the company's website at www.Evactron.com or send a request to sales@evactron.com. Visit XEI at M&M, booth #724.
About XEI Scientific, Inc.
XEI Scientific Inc. invented the Evactron De-Contaminator in 1999 as the first plasma cleaner to use a downstream cleaning process to remove carbon from electron microscopes. A proprietary plasma source uses air to produce oxygen radicals for oxidation of carbon compounds for removal by the pumps. Carbon-free-vacuum produces the highest quality images and analytical results from SEMs and other vacuum analytical instruments. XEI innovations include a unique RF plasma generator, a patented RF electrode, and easy start programmed plasma cleaning. All XEI products come with a 5 year warranty and are compliant with CE, NRTL, and Semi-S2 safety standards. XEI offers a variety of Evactron systems to meet user needs and has over 1000 installations around the world. For more information on products and services offered by XEI Scientific, Inc., see their website (www.evactron.com).
