Piezoelectric Motors are suited for vacuum environments.
Press Release Summary:
Available from single-element motor that provides .45 kg of force to ark 8-element motor that provides 3.6 kg of force, HR series can drive linear and rotary stages. HR-V vacuum series is rated up to 10-7 torr, and HR-UV is rated up to 10-10 torr. Both configurations are suitable for bake out and operate without any magnetic field. This makes them suited to E-Beam writing and inspection and other processes sensitive to magnetic fields.Original Press Release:
Standard Vacuum and Ultra High Vacuum Piezoelectric Motors
Nanomotion is pleased to introduce its family of HR-V and HR-UV Series motors for use in vacuum environments. With a size range from a single element (providing .45kg of force) to ark eight element motor (providing 3.6kg of force) the HR series is capable of driving both linear and rotary stages. The HR-V vacuum series is rated up to 10-7 Torr and the HR-UV is rated up to 10-10 Torr. Both configurations are suitable for bake out and operate without any magnetic field, making them well suited to E-Beam writing and inspection and other processes that are sensitive to magnetic fields.
Nanomotion Inc. offers a wide range of unique piezoelectric motors based on ultrasonic standing waves, for advance motion control and automation systems. Nanomotion's patented technology offers exceptionally high resolution, unlimited travel, and no intrinsic magnetic field. The compact packaging and ability to drive linear or rotary devices make this technology well suited to applications in Semiconductor, Fiber Optic, Electronics, Bio-Medical/Pharmaceutical, Automotive, and General Assembly manufacturing equipment.
With over 20 patents issued for its piezo products and technologies, Nanomotion provides standard and custom motor and control configurations to meet a variety of performance criteria. Headquartered in Israel, worldwide support is provided by corporate offices in the United States, Europe, and Asia.
Source: Nanomotion Inc
Contact: Ernie Ponce
1 Comac Loop, Suite 14B2
Ronkonkoma, NY 11779
Tel: 800-821-6266
Fax: 631-585-1947
email: eponce@nanomotion.com
