Press Release Summary:
Replacing traditional spin coating equipment, Model SPT200 is designed to meet challenges of coating high aspect ratios and deep well topographies such as MEMS wafers with photoresist. System is typically configured with Vortex or AccuMist ultrasonic spray shaping nozzles, depending upon requirements. Designed for 100, 150, 200, and 300 mm wafers, SPT200 provides automated spray coating with recipe storage, precision temperature control, and integrated wafer lockdown.
Original Press Release:
Sono-Tek Corporation to Introduce Game-Changing Photoresist Ultrasonic Coating System at SEMICON West
Milton, NY — Sono-Tek Corporation (OTC BB: SOTK) today announced plans to unveil a new photoresist ultrasonic coating system in Booth #2146 at SEMICON West, scheduled to take place July 12-14th at the Moscone Center in San Francisco, CA. The new photoresist coating system, SPT200, has been designed specifically to meet the unique challenges of coating high aspect ratios and deep well topographies such as MEMS wafers with photoresist.
The SPT200 replaces traditional spin coating equipment, providing more uniform coverage of side walls in difficult to coat applications. Ultrasonic spray has been used for photoresist deposition for years, and is a well proven method for semiconductor lithography manufacturing.
SPT200 is typically configured with Vortex or AccuMist ultrasonic spray shaping nozzles, depending upon coating requirements. Sono-Tek’s team of application engineers ensures the correct configuration for each process. At the heart of the system is Sono-Tek’s patented ultrasonic nozzle technology. All ultrasonic nozzles feature up to 95 percent reduction in material consumption, non-clogging performance, and precise, targeted spray patterns at ultra-low flow rates.
SPT200 unique system features include:
• Automated spray coating with recipe storage
• Designed for 100, 150, 200, and 300mm wafers
• Precision temperature control
• Integrated wafer lockdown
• Highly repeatable syringe pump with auto refill
• Manual wafer load/unload
• Highly repeatable, stable process
Sono-Tek has extensive application expertise in depositing photoresist onto MEMS and other semiconductor wafer substrates.
See the new SPT200 machine in action at SEMICON West, or visit www.sono-tek.com/photoresist-coating-system-for-semiconductor-lithography for more information.
For more information about Sono-Tek’s unique technologies and complete spray solutions, visit www.sono-tek.com.
About Sono-Tek Corporation
Sono-Tek is the world leader in the development and application of liquid ultrasonic atomization technology into nozzle systems and spraying and coating application systems. Compared to conventional pressure spraying methods, the company’s ultrasonic nozzles do not clog, reduce liquid usage, waste, and environmental impact while achieving much more precise, uniform, thin film coatings. Sono-Tek is continually developing new applications for its unique technology, replacing wasteful practices in a world that is growing ever more environmentally sensitive. For more information, visit the company at www.sono-tek.com.