Ozone Generator suits semiconductor applications.

Press Release Summary:




Compact Series OG-5000 produces ozone gas via controlled electrical discharge. Addition of ppm levels of doping or spiking gas increases ozone production and ensures stability of ozone concentration over time. Modular construction allows generator to be configured to meet various application and budget requirements. Series is available as stand-alone ozone generator or as part of complete turnkey integrated ozone gas or DIO3 water delivery system.



Original Press Release:



IN USA Introduces New OG-5000 High Purity Ozone Generator for Semiconductor Applications



Needham, Massachusetts, USA - IN USA Inc., a leading manufacturer of Ozone (O3) monitoring and control instrumentation, announces the introduction of its patent pending Series OG-5000 Ozone Generators, designed to produce high purity ozone gas at very high concentrations for a variety of semiconductor manufacturing applications. These applications include Chemical Vapor Deposition (CVD); Atomic Layer Deposition (ALD); Oxide growth; Surface conditioning; Ashing; Wet Processing; Particle Cleaning; Photoresist Removal; Epitaxy; and others.

Ozone gas is generated in the OG-5000 series by means of controlled electrical discharge. The addition of ppm levels of a "doping" or "spiking" gas increases the ozone production in the OG-5000 and, most importantly, ensures the stability of the ozone concentration over time. The unique design of the OG-5000 series generator combined with the unique materials used in the construction of the generating cells delivers an ozone-oxygen mixture of the highest purity and concentrations in the market.

The OG-5000 series of ozone generators are very compact and modular. This modular construction allows for the generator to be easily configured to meet a wide range of application and budget requirements. The OG-5000 series of generators are priced very competitively with the added benefit of requiring no consumables bringing the cost of ownership considerably down.

The OG-5000 series is available as a stand-alone ozone generator, or as part of a complete turnkey integrated ozone gas or DIO3 water delivery systems (Model ODS series).

IN USA, Inc. offers a complete line of ozone analyzers, monitors, sensors, destructs and controllers for gas or liquid phase measurements and a family of complete turnkey ozone gas or DIO3 water delivery systems. For more information, visit www.inusacorp.com or contact the company at 87 Crescent Road, Needham, Massachusetts, 02494 USA; Toll Free (US) 800-798-4029; Tel. (001) 781-444-2929; Fax (001) 781-444-9229; E-mail: info@inusacorp.com .

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