Nilfisk SS Vapor Vac Helps Semiconductor Companies Reduce Emissions; Meet goals of EPA's PFC Reduction/Climate Partnership Program

Malvern, PA, July 10, 2009--Now more than ever, the semiconductor industry is responding to the challenge of climate change by collaborating with EPA to measure, record, and reduce emissions of high global warming potential (high GWP) gases and by working aggressively to identify and install environmentally friendly technologies that not only protect the climate but also improve production efficiencies.

Nilfisk's SS Vapor Vacuum is a specialized vacuum cleaner designed to safely collect toxic semiconductor gases and particulate, including arsine, phosphine, and chlorinated solvent vapors (carbon tetrachloride and chloroform). The SS Vapor Vac efficiently captures and retains the vapors released during the cleaning of semiconductor process equipment such as molecular beam epitaxy (MBE) chambers, ion implanters, and plasma etching machines.

The innovative machine features a five-stage filtration system that includes a carbon filter cartridge. The cartridge's patented honeycomb design provides the most complete contact and longest dwell-time possible, preventing the activated carbon and toxic vapors from being exhausted back into the local environment.

Additional stages of filtration complete the system by collecting solid particulates to further protect workers from exposure. These stages include a 2 ¼ gallon, 2-ply paper bag filter; a HEPA-type pre-filter wafer; an optional microfilter; and an optional downstream HEPA or ULPA exhaust filter. The downstream HEPA or ULPA exhaust filter maintains cleanroom levels by ensuring all collected particles are retained within the vacuum, rather than exhausted out of the outlet.

Nilfisk CFM, the industrial vacuum division of Nilfisk-Advance America, helps its industrial customers meet their individual cleaning requirements and challenges with an extensive range of high-performance vacuum cleaners. From its Malvern, Pa. headquarters, the IVAC division provides industrial vacuums for heavy-duty applications that require maximum suction power; and specialty vacuums for clean applications that demand "absolute" air purity and facility cleanliness. The company's vacuums are equipped with industry-specific features and exceptionally efficient filtration systems, ensuring dust- and debris-free facilities in the food, chemical/pharmaceutical, electronics, metalworking/powder coating, and a variety of manufacturing industries.


Rachel Brutosky
PR Coordinator
(610) 232-5469

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