New Direct Drive Rotary Tables Feature Repeatability of 0.5 arc-sec

Intellidrives, Inc Jun 12, 2018

Press Release Summary:

ACR-335UT Direct Drive Rotary Tables are equipped with high-speed direct-drive rotary servo motor. Featuring 335 mm center aperture, units provide a maximum speed of 300 rpm and resolution of 0.2 arc-sec. The rotary table is suitable for handling 300 mm silicon wafers and can be installed into XY tables with a minimal stack-up height. The table is suitable for applications ranging from precision indexing to high-speed laser machining to precision wafer inspection.

Original Press Release:

IntelLiDrives, Inc. has Released a New Direct Drive Large Aperture Rotary Tables for Wafer Processing

Key features:

Direct drive (DDR) technology
Resolution 0.2 arc-sec
Repeatability 0.5 arc-sec
Max speed 300 rpm
Center aperture 335 mm
Ultra-thin design 22 mm

ULTRA LOW PROFILE, VERY LARGE APERTURE

The ACR-335UT precision rotation stage is the lowest profile rotary table with high-speed direct-drive rotary servo motor on the market.

Large 335 mm center aperture and lightweight construction makes this rotary stage an ideal choice for handling 300-mm silicon wafers for semiconductor processing.

HIGH PRECISION, HIGH DYNAMICS

ACR-335UT has very wide dynamic speed range and can move at sub-rpm speed with very low velocity ripple and accelerate quickly to 300 rpm.

This stage can be easily installed into IntelLiDrives low profile open frame XY tables with a minimal stack-up height to minimize Abbe error.

APPLICATIONS, CONFIGURATION

Ultra-thin series direct-drive rotary stages provide superior angular positioning and velocity control. Applications range from precision indexing to high-speed laser machining to precision wafer inspection.

IntelLiDrives offers a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.

APPLICATIONS