Nanopositioning Actuators have precision flexure guides.

Press Release Summary:

Available in 3 versions that provide up to 480 µm travel, PiezoMove® lever amplified Z-actuators feature internal frictionless flexure-guides. Stiff design, with resonant frequencies to 750 Hz, allows for millisecond settling times. Products are also available with integrated, absolute-measuring position sensors for closed-loop operation, with linearity to 99.8% and repeatability to 0.2 nm. PICMA® multilayer actuators feature cofired ceramic encapsulation.

Original Press Release:

Lever-Amplified Nanopositioning Actuators now Boast Precision Flexure Guides

Auburn, MA, - May 2006 - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, semiconductor and life science applications, offers the new compact PiezoMove® lever amplified Z-actuators.

PiezoMove® vs. Conventional Lever Amplified Actuators
Lever amplified piezo actuators provide significantly longer travel ranges than standard, direct drive actuators. What sets PiezoMove® actuators apart are the internal frictionless flexure-guides, making additional bearings or guiding mechanisms obsolete when integrating the actuators into a positioning system. Three versions providing up to 480 µm travel are available.

Closed-Loop Option Offers Nanometer Precision
Piezo actuators can basically move in sub-nanometer increments. However, open-loop actuators do not provide high linearity / repeatability. PiezoMove® actuators are available with integrated, absolute-measuring position sensors for closed-loop operation with high linearity (99.8%) and nanometer range repeatability.

Stiff Design With Very Fast Response: Millisecond Settling Times
The stiff design with high resonant frequencies to 750 Hz allows settling times of only a view milliseconds, ideal for highly dynamic applications.

Ceramic-Encapsulated Actuators for Long Lifetime
Reliability is assured by the use of award-winning PICMA® multilayer actuators, which are integrated into a sophisticated, single-module, flexure guiding system. The PICMA® actuators feature cofired ceramic encapsulation and thus offer better performance and reliability than conventional piezo actuators. The wire-EDM-cut flexures are FEA modeled to make them extremely precise. In addition they are maintenance-free and not subject to wear.

Typical Applications
Nanopositioning, Semiconductor Testing, Adaptronics , Photonics / Integrated Optics, Biotechnology

Features & Advantages
o Flexure Guidance for Frictionless, Ultra-Straight Motion
o Low Cost, Custom Designs
o Travel Ranges to 480 µm
o Resolution to 0.2 nm
o High Dynamics and Stiffness
o PICMA® High-Performance Piezo Actuators
o Open and Closed-Loop Versions

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