Motion Solutions for the Semiconductor Industry


Aerotech has designed and manufactured motion solutions for industries ranging from assembly to test and inspection, and one of our most important markets is semiconductor manufacturing. We've developed a wide array of standard products, custom motion systems, and components and systems with vacuum capabilities to 10-7 torr and active cooling, all devoted to improving the semiconductor manufacturing process. We'd like to highlight just a few of these standard products developed specifically for semiconductor manufacturing applications.

MaskAlign 100 is a high-performance photomask-aligning system designed to meet the exacting requirements of advanced semiconductor and flat panel writing systems.

WaferMax T rotary stage was designed for applications that require high performance in a low-height package, such as precision wafer inspection. The WaferMax T won the prestigious Semiconductor International Editors' Choice Best Product 2007 award.

WaferMax Z is a high precision vertical alignment stage that was developed to function seamlessly both alone, and in tandem with the WaferMax T. The WaferMax Z won the 2006 EuroAsia IC Industry Award.

These are just a few of our standard products that were developed to provide the semiconductor industry with the highest performance motion solutions. Aerotech also designs and manufactures custom motion solutions to specification. Please CONTACT AEROTECH for more information on our industry-specific motion solutions.

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