Monitor analyzes liquid chemical concentration.
Press Release Summary:
Installed in process system or at point of use where chemicals are delivered or blended, Model CR-288 delivers real-time measurements of concentration and temperature of process fluids. Software enables calibration for chemical mixtures used in semiconductor laboratory or manufacturing processes, including etching, wafer cleaning, and CMP. With response time of 1.2 s, monitor provides eight 4-20 mA outputs for temperature and concentration with accuracies of 0.1°C and ±0.1%, respectively.
Original Press Release:
Swagelok CR-288 Concentration Monitor
Product Overview
The Swagelok CR-288 concentration monitor addresses a critical requirement in the semiconductor industry for improved monitoring and control of liquid chemicals employed in device manufacturing. Installed in the process stream or at point of use where chemicals are delivered or blended, the technology delivers real-time, highly accurate measurements of the concentration and temperature of process fluids.
The CR-288 is the first compact device in the industry to provide in-line analysis of liquid chemical concentration. Designed specifically for the semiconductor industry, it is physically small, easy to install, and serviceable in the field. Proprietary software enables the technician to calibrate the unit for chemical mixtures used in semiconductor laboratory or manufacturing processes, including etching, wafer cleaning, and chemical mechanical planarization (CMP). The software provides a graphical readout that the technician may customize for data logging over time.
The technology can help the industry reduce chemical consumption, improve process control and visibility, detect process problems, reduce wafer scrap, and improve productivity. In addition, it will facilitate point-of-use spiking, blending, and mixing and help ensure chemical and ultrapure water quality.
Speed and Accuracy
o Concentration accuracy: ± 0.1 %. Concentration accuracy is based on measuring ethylene glycol and water at 20 psig (1.3 bar), 76.1 to 78.8° F (24.5 to 26° C), and calibration range of 0 to 100%.
o Temperature accuracy: 0.1° C
o Temperature resolution: 0.01° C
o Response time: 1.2 s
Principle of Operation
The CR-288 employs an LED light source, a mirror, a sapphire and a photodiode-array detector to measure refraction. Light is beamed at a sapphire window that is in contact with the process liquid. A reading is taken as the light bounces back, enabling computer software to determine the index of refraction for the liquid in question. That index of refraction may then be compared to the index of refraction for the desired blend or concentration of chemicals. The only components that come into contact with the liquid are the sapphire window and the body of the sensor, which is made of ultrahigh purity modified PTFE. A thermocouple inside the optical fluidic cell takes a temperature reading. A liquid's index of refraction is a function of concentration and temperature.
Applications
o Wafer cleaning
o Etching
o Chemical Mechanical Planarization (CMP)
Product Components
Sensor
o Intuitive interface, increases design flexibility and scalability
o Semi-grade sapphire serviceable in the field
o Modified PTFE body contains optical reflectivity device
o Large bowl size optimizes fluid flow over sensor (Cv 0.3 to 0.9)
o Ultrahigh purity, meets SEMI F57-0301 and SEMI EN33-94
o Compatible with aggressive chemicals; HF and HCL tested
o Process transparency, no moving parts
o Compact size
o Fine thread flare and Nippon Pillar® Super 300 end connections are standard; other end connections available
Digital Display Unit
o Simultaneous measurement of concentration and temperature
o Connects up to four sensors per unit
o LCD display
o Two 5 volt digital output channels
o Eight 4-20 mA output for temperature and concentration
o CE conformity
o Compact size
Cable
o Connects the sensor to the digital display unit
o FEP jacketed, EMC shielded 10 ft (3 m) instrumentation cable
o IP67-rated snap on connector to HD 15 serial connector
288-connect® Software
o Windows® based interface
o Interfaces in real time
o Allows rapid field calibration
o Data graphing and logging
o External alarm control
o Chemical concentration offsets
o Adjustable rolling average
o Re-zero function
About Swagelok
Swagelok Company develops and manufactures fluid system component technologies and provides solutions for the research, instrumentation, semiconductor, pharmaceutical, oil and gas, power, petrochemical, and alternative fuels industries.
