Modular Dry Pump targets semiconductor processes.

Press Release Summary:



Intended for stringent demands of 300 mm applications, iGX platform is also effective in 200 mm fabs. Active Utility Control feature helps cut utility consumption during idle periods. The iGX provides Ethernet connectivity and web page publishing of key data, as well as comprehensive set of other networking options to assure pump availability.



Original Press Release:



BOC Edwards Sets New Standard with iGX Drypump Platform



SAN FRANCISCO, CA (July 12, 2004)-BOC Edwards, a leader in the supply of vacuum systems and services, has announced the launch of its new iGX platform, responding to an industry need for a versatile, low utility cost, high-reliability, high-performance drypump for semiconductor processes.

The iGX platform sets new standards in excellence, offering users a wide range of variants and peak speeds to address applications from clean through to medium-duty processes. Introduction follows extensive testing, end user trials and qualification by several tool manufacturers. Its modular design and compact footprint allow for extensive configuration to suit customer needs.

On processes supported by the iGX, users will benefit from long overhaul intervals, as well as improved efficiency for lower cost of ownership. Typically, customers can expect an annual utilities cost saving of 40%.

Designed for the stringent demands of 300 mm applications, iGX will also prove cost effective in 200 mm fabs. In addition, BOC Edwards' Active Utility Control feature can significantly reduce utility consumption during idle periods.

The iGX range also provides ethernet connectivity and web page publishing of key data, as well as a comprehensive set of other networking options, so that pump availability can be assured.

BOC Edwards, part of The BOC Group plc, is a leading supplier of integrated solutions for the manufacture of microelectronics devices, including silicon semiconductors, compound semiconductors and flat panel displays. Partnering with fabs, foundries and process tool manufacturers, BOC Edwards provides process-enabling subsystems that are supported by best-in-class operations and maintenance services for its global customer base.

Serving two million customers in more than 50 countries, The BOC Group is one of the largest and most global of the world's leading gases companies. It employs over 46,000 people and had annual sales of over £4.3 billion (US $7 billion) in 2003. For more than a century BOC's gases and expertise have contributed to advances in many industries and aspects of everyday life, including steel-making, refining, chemical processing, environmental protection, wastewater treatment, welding and cutting, food processing and distribution, glass production, electronics and health care.

Information on the BOC Group can be accessed by visiting the Group web site, www.boc.com. Specific information on BOC Edwards can be accessed directly on www.bocedwards.com or e-mail: info@bocedwards.com.

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