MKS Exhibits New Baratron® Differential Capacitance Manometers at Semicon West 2008

Andover, MA, May 2, 2008 - MKS Instruments, Inc. will showcase its new Type 226A and 228A Baratron® Differential Capacitance Manometers at this year's SEMICON West show, July 15-17 in San Francisco. The units provide accurate and repeatable differential pressure and vacuum readings from 1,000 to 0.2 Torr (133 to 0.027 kPa) at ambient temperature. The direct linear signals are accurate for very small pressure drops and flow rates, and the measurements are not sensitive to gas composition, eliminating any need for gas-specific correction factors.

The Inconel® nickel alloy capacitance sensor is highly corrosion resistant, permitting use in difficult chemical environments. The Baratron manometer operates on either ±15VDC or +24VDC input voltage, and offers four different analog output signals in either uni-directional or bi-directional calibrations, making them suitable for use in a wide variety of processing systems. The units' rugged, industrial-grade design makes them highly immune to RF and EM interference.

The Type 228A manometer features two user-configurable, independently-adjusted and UL-listed electromechanical trip relays that can be set for activation anywhere from 0 to 100% of the full-scale range. The dimensions of these new units allow direct replacement of existing unheated Baratron capacitance manometers. Applications include air and gas flow measurements for filters and analytical systems, downstream pressure control in thin film processing systems, and automated leak testing systems. Both products are CE marked and meet current Reduction of Hazardous Substances (RoHS) regulations in the European Union.

About MKS:

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, electrostatic charge management, control and information technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, data storage media, and other advanced coatings. We also leverage our technology in other markets with advanced manufacturing applications including medical equipment, pharmaceutical manufacturing, and energy generation and environmental monitoring.

Corporate contact:

Lisa Condon
Phone: 978-645-5548
Fax: 978-557-5100

MKS Instruments, Inc.
SEMICON/West 2008
Booth Number 1721


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