Miniature Translation / Rotation Stage Family Comes with Piezo Scanner Option

Auburn, MA, - March 2006 - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, semiconductor and life science applications offers one of the smallest motorized stage families in the world, capable of delivering 50 nanometer incremental motion.

One to 4 Axis Systems, Very Compact, from 62x60 mm Footprint
The M-110 series translation stages provide linear motion of 5, 15 and 25 mm. X, XY and XYZ systems are available, and can be combined with the M-116 miniature rotary stage. The systems can also be equipped with high-speed piezo drives for scanning or positioning with nanometer precision.

Typical Applications
Biotechnology, Metrology, Micromachining, Medical technology, Micromanipulation, Photonics Packaging

Features & Advantageso Folded Drives Provide Footprint as small as 62x60 mm (~2.5x2.4 in)o 50 nm True Minimum Incremental Motion (7 nm Motor / Encoder Resolution!)o 5, 15 and 25 mm Linear Travel Ranges, 360 deg. Rotary Rangeo Choice of Lead Screw Drives (lower cost) and Ball Screw Drives (Higher Speed / Continuous Operation)o Choice of Closed-Loop DC Motors (higher precision) and Stepper Motors (Lower Cost)o Integrated Hall-Effect Limit and Reference Switcheso Piezo Option for fast Scanning / Positioning with 1 nm Resolution

Choice of Motors and Drives
Lead screws (higher resolution) and ball screws (higher speed / longer lifetime) are offered, driven by stepper motors (lower cost) and closed-loop servo motors (higher precision). The encoder on the DC servo motor version features 0.007 µm resolution per count.

Hybrid Option with High-Speed Piezo Scanner
For applications requiring extremely high resolution or very fast scanning, a closed-loop piezo scanner can be mounted on the stages. It provides 1 nm resolution and response times of a few milliseconds.

A large variety of PC-plug-in and stand-alone controllers are offered to suit all needs. Software for alignment applications is also available.

East Coast Contact:
Jim Gareau
Tel:(508) 632-3456
Fax:(508) 632-0506

West Coast Contact:
David Steinberg
Tel:(949) 679-9191
Fax:(949) 679-9292

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