Micro Laser Interferometer fits in tight spaces.

Press Release Summary:



Combining Michelson interferometer with 650 nm semiconductor laser in 47 x 32 x 19 mm package, Model DS-80 provides continuous detection of tiny movements in variety of products and applications. Non-contact displacement sensor is capable of 0.08 nm resolution with response of 50 Hz. Measuring range is ±50 µm and linearity is less than ±0.02% of full scale. Type A model features working distance of 10 mm, while Type B offers distance of 2.5 mm.



Original Press Release:


Canon U.S.A. Introduces New Ultra-Precision Micro Laser Interferometer


LAKE SUCCESS, NEW YORK, November 24, 2004 - The Semiconductor Division, Encoder Products Group, of Canon U.S.A., Inc., a subsidiary of Canon Inc. (NYSE: CAJ), has introduced the DS-80 Micro Laser Interferometer with precision optical technology, for the continuous and accurate detection of tiny movements in a wide variety of products and applications. The non-contact displacement sensor is capable of ultra-high resolution (0.08nm) with a maximum high-speed response of 50Hz. It combines a Michelson interferometer with a 650nm semiconductor laser in a tiny package (47x32x19mm) that enables its usage in tight physical space situations.

The DS-80 employs the Michelson interference method* to make highly accurate measurements based on the laser's wavelength. Measuring range is +/-50µm. Linearity is less than +/-0.02% of full scale. With the Canon DS-80, microscopic objects can be measured by a small beam spot. The micro laser interferometer is an ideal solution for manufacturers of audio speakers, and measures surface differences in semiconductor wafers and hard disk drives, and side action variance in bearing systems and X/Y stages.

Two versions of the Canon DS-80 sensor have been designed to support this wide range of requirements. The A-type features a working distance of 10mm and the B-type features a working distance of 2.5mm. Two types of data acquisition board also available: Standard version with 100Mhz sampling and high-speed with 500Hz sampling.

Canon U.S.A., Inc. delivers consumer, business-to-business, and industrial imaging solutions. The Company is listed as one of Fortune's Most Admired Companies in America, and is ranked #35 on the Business Week list of "Top 100 Brands." Its parent company Canon Inc. (NYSE:CAJ) is a top patent-holder of technology, ranking second overall in the U.S. in 2003, with global revenues of $29.9 billion. For more information, visit www.usa.canon.com.

*The DS-80 incorporates the Michelson Interference method discovered in the Michelson-Morley experiments.

All referenced product names, and other marks, are trademarks of their respective owners.

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