Micro Actuator targets in-vivo biomedical applications.
Share:
Press Release Summary:
Fabricated using silicon-on-insulator micromachining, Ultra Low-Power Actuator combines ±50 µm range with ±195 µN force to position in-vivo brain electrodes. MEMS device operates at 11 V and consumes below 100 nW, making it suited for applications that require long battery life. Integrated with micro-needle in watertight encapsulation that does not hinder movement, package includes flip-chip mounted glass cap and hydrophobic surface treatment to prevent water ingress.
Original Press Release:
IMEC's Ultra-Low Power Actuator Suitable for In-Vivo Biomedical Applications
Leuven, Belgium - October 5, 2009 - IMEC has developed an actuator that runs on ultra-low power and that is watertight. This innovative combination of characteristics makes the actuator especially suited for use in in-vivo biomedical applications, and, in general, for all applications that need to combine a long autonomy with small batteries. IMEC's prototype has an integrated micro-needle, which can be steered by the actuator.
The new actuator is fabricated using SOI-based (silicon-on-insulator) micromachining. The actuator combines a large range (±50µm) with sufficient force (±195µN) to position for example in-vivo brain electrodes. It works at 11V, which is three times lower than the operating voltages of the current available actuators. Moreover, the actuator consumes below 100nW and can therefore be used in applications that require a long battery life. IMEC has integrated the actuator with a micro-needle in a watertight encapsulation that does not hinder the movement of actuator and needle. The package includes a flip-chip mounted glass cap and hydrophobic surface treatment to prevent water ingress.
A micro-actuator is a MEMS-device (micro-electromechanical system) that converts energy into micro-movements, allowing it to position or control elements with a high precision, and with steps of a few micrometers or even nanometers. IMEC's actuator is an electrostatic inchworm actuator, having 6 arms that selectively latch, unlatch, and drive.
Today, micro-actuators are already used in medical applications where biological objects or their environment need to be controlled at the microscopic scale. Examples are micro-manipulators, micro-surgery tools, micro-pumps, and micro-needles. One particular biomedical application of micro-actuators is to integrate them with microprobes for brain applications. Today, actuators for brain implants are already used during brain research; but they are placed outside the body. IMEC's inchworm actuator combines small size with water tightness and a long autonomy, enabling implantation and thus long-term patient treatment. The actuator could be used to accurately control the position of micro-needles used in brain applications. This is necessary to reach the correct groups of neurons for the specific disorder and to get near the neurons for a better signal to noise ratio.
About IMEC
IMEC performs world-leading research in nanotechnology. IMEC leverages its scientific knowledge with the innovative power of its industrial partners. In ICT, healthcare and energy, IMEC delivers industry-relevant technology solutions. In a unique high-tech environment, IMEC's international top talent is committed to providing the building blocks for a better life in a sustainable society.
IMEC is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China and Japan. Its staff of more than 1,650 people include over 550 industrial residents and guest researchers. In 2008, IMEC's revenue (P&L) was 270 million euro.
Further information on IMEC can be found at www.imec.be.
IMEC is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut"), IMEC in Belgium (IMEC vzw supported by the Flemish Government), stichting IMEC Nederland (IMEC-NL) and IMEC Taiwan Co. (IMEC-TW).
Contact:
IMEC : Katrien Marent, Director of External Communications, T: +32 16 28 18 80, Mobile : +32 474 30 28 66, katrien.marent@imec.be
