Metrology System supports 3D wafer fabrication.

Press Release Summary:

By offering wide range of metrology measurements that drive tighter process control for critical parameters in Logic, Flash, and DRAM, HelioSense100™ Optical CD System supports industry transition to multi-patterning small pitch manufacturing and 3D vertical devices. Standalone system is optimized by NovaMARS modeling software and Nova's high-performance computation solution, allowing customers to utilize system from early R/D stages through to manufacturing and device maturity.

Original Press Release:

NOVA Extends Its Optical CD Portfolio with new Metrology Solution for Advanced Technology Nodes

Tight collaboration with leading customers yields a state of the art standalone product for the most challenging 3D wafer fabrication processes

REHOVOT, Israel, – Nova Measuring Instruments (Nasdaq: NVMI), a leading innovator and key provider of metrology solutions for advanced process control used in semiconductor manufacturing, announced today the launch of its new standalone Optical CD system, the HelioSense100™, targeted at the most complex device manufacturing across the semiconductor segments. Multiple HelioSense100™ systems were ordered already in the last few months and are in use by leading customers worldwide. The company expects to recognize initial revenues for this system within the third quarter of 2015.

With its unique optical technology, combining high precision, superior accuracy and new channels of information, the HelioSense100™ is a state of the art metrology platform that addresses well the most challenging requirements arising from the industry's technological transitions in the next years to come. The HelioSense100™ supports the industry transition to multi-patterning small pitch manufacturing and 3D vertical devices by offering a wide range of metrology measurements that drive tighter process control for the most critical parameters in Logic, Flash and DRAM.

The HelioSense100™ system is enhanced by Nova's modeling solutions, as part of the latest NovaMARS modeling software, and Nova's newly introduced high performance computation solution, allowing customers to adopt the new system in early R&D stages and effectively utilize it all the way to later stages of high-volume manufacturing and device maturity.   

"As a leading metrology innovator for advanced process control, we are committed to maintaining our technological lead by introducing new breakthrough solutions that will assist our customers in their growing technology challenges and contribute to their long term success," stated Eitan Oppenhaim, Nova's President and CEO. "Across all industry segments our customers require advanced metrology systems that can control complex process parameters in the most advanced nodes. The HelioSense100™ is exactly this tool, featuring state-of-the-art technology that combines multiple innovations, pushing the metrology technical envelope even further. The multiple orders and installations we have so far are a vote of confidence in the newly introduced technology, and we are excited from its market adoption so far." 

About Nova: Nova Measuring Instruments Ltd. delivers continuous innovation by providing advanced metrology solutions for the semiconductor manufacturing industry. Deployed with the world's largest integrated-circuit manufacturers, Nova's products deliver state of the art high performance metrology solutions for effective process control throughout the semiconductor fabrication lifecycle. Nova's holistic approach and complete suite of products, which combines high-precision hardware and cutting-edge software, support the development and production of the most advanced devices in today's high-end semiconductor market. Our technical innovation and market leadership enable customers to improve their process performance, products yields and time to market. Nova acts as a partner to semiconductor manufacturers from its offices around the world.

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Nova is traded on the NASDAQ & TASE under the symbol NVMI.

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