Metrology System sub 0.1° pre-alignment accuracy.
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Press Release Summary:
To meet metrology needs, IVS 155 IVS 155 features robotics for sub 0.1° pre-alignment accuracy. Optical overlay registration and CD metrology system also features RJG off line recipe creation and structural metrology suite.
Original Press Release:
Soluris Introduces IVS 155 Optical Overlay Registration and CD Metrology System for Enhanced Productivity
Soluris continues tradition of rock solid metrology with the new IVS 155 which features 20% tighter precision and new robotics for sub 0.1 degree pre-alignment accuracy.
Concord, MA - January 14, 2005 - Soluris, a manufacturer of optical overlay and CD-SEM Metrology Systems, announced today the release of the new IVS 155. Measurement precision has been improved by 20% to meet today's advanced metrology needs. A number of features have been added to the system to build on the solid reputation of the IVS series metrology systems.
"Soluris has been one of our most consistent and reliable vendors" said Nabil Alali, executive director of equipment engineering & fabrication operations at Jazz Semiconductor in Newport Beach California. "Their IVS series optical metrology systems are among the most reliable tools in the fab. That allows my engineers to focus their efforts on process, and not equipment issues. When we do need service, Soluris is attentive to our needs and delivers what they promise."
"The IVS 155 continues the tradition of rock solid metrology." added Neal Sullivan, Soluris vice president of technology. "We have tightened the precision and made a number of other upgrades that improve the system automation and functionality. The standard features on the IVS 155 such as RJG off line recipe creation and the structural metrology suite are in direct response to our customers needs."
About Soluris
Soluris Inc., headquartered in Concord, MA, USA, has supplied instrumentation for optical and electron metrology since 1980, formerly as Schlumberger Verification Systems. With offices in North America, Europe and Asia, and a large international installed base, Soluris has the global reach and expertise to support installations worldwide. The group has been selected as a 10 BEST supplier of process diagnostic equipment in VLSI Research's Customer Satisfaction Survey in each of the last 5 years, including the #1 position in 2003 and 2004. With the introduction of its Yosemite CD-SEM, which won an R&D 100 award this year, Soluris has positioned itself as an innovative technology leader in next-generation model-based metrology. More information is available at www.soluris.com.
Contact: Paul C. Knutrud, Soluris Inc., +1 978-318-4041, pknutrud@soluris.com
