Metrology System measures surface and contour in single pass.

Press Release Summary:




Featuring automated motorized operation and joystick control, MarSurf® UD 120 has magnetic probe mounting feature that not only prevents probe damage, but allows probe changes in seconds, without additional tools. Probe offers measuring range of 10-20 mm, while drive unit allows traversing lengths from 0.1-120 mm with drive speeds from 0.1-2 mm/s. Probe's motion is sensed by optical measuring system based on rocker-arm principal with stylus tip on one end and interferometer on other.



Original Press Release:



New MarSurf UD 120 Measures Surface and Contour in Single Pass



Economically Priced MarSurf® UD 120 Measures Surface and Contour in Single Pass

-- Automatic operation provides fast, high-precision, nm range measurements

-- Patented breakaway probe mounting prevents damage, allows probe change in seconds

PROVIDENCE, RI - The new MarSurf® UD 120 from Mahr Federal can generate both surface and contour measurements in a single pass. Designed for economy, the system provides high accuracy over a large measuring range in nanometer resolutions. The MarSurf UD 120 includes both automated motorized operation and joystick control, along with a patented magnetic probe mounting feature that not only prevents probe damage, but allows probe changes in seconds and without any additional tools.

The drive unit on the MarSurf UD 120 allows traversing lengths from 0.1 mm to 120 mm with drive speeds between 0.1 and 2 mm/s. A glass scale in the x-direction allows automatic positioning. The probe's motion is sensed by an optical measuring system based on a rocker-arm principal with the stylus tip on one end and an interferometer on the other. Probe movement is registered by photo diodes and evaluated electronically. This innovative measuring method allows the system to achieve a very high resolution over a large range. Probe measuring range is 10-20 mm, and the unit's standard LD A14-102/60° diamond probe yields z-axis resolution of 2 nm and a residual Rz0 value of 60 nm. Different probe geometries are also available.

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