MEMS Low Pressure Sensor includes I2C digital interface.

Press Release Summary:

Available in pressure ranges of 0.14, 0.3, 0.6, and 1.4 psi, Model SM9541 offers 14-bit resolution, ±1% FS accuracy, and 0.2% FS offset stability per year for critical applications. MEMS pressure transducer mates with signal conditioning IC, providing full pressure calibration and temperature compensation with I2C digital interface. Based on surface mount technology standards, housing features JEDEC compliant SOIC-16 footprint for straight-forward PCB design and assembly.

Original Press Release:

SMI Launches Digital MEMS Low Pressure Sensor

Milpitas, California – SMI (Silicon Microstructures, Inc.)  introduces the SM9541 MEMS low pressure sensor Series designed especially for cost sensitive applications that need very high accuracy. The unique gage and differential offering allows for optimal signal resolution and diagnostics capability. The 14-Bit resolution and 1% accuracy provide the user high performance while the 0.2% full-scale offset stability per year provides the reliability and long-term reliability needed for critical applications. Available in low pressure ranges of 10, 20, 40, and 100 cm-H2O (0.14, 0.3, 0.6, and 1.4 PSI).  The SM9541 stands to revolutionize the low pressure sensor market with an I2C digital interface coupled with the highest accuracy and stability in the industry. Custom solutions are available for custom pressure and temperature ranges.

At the heart of the SM9541 is the MEMS pressure transducer with SMI’s novel and proprietary silicon technology platform. With SMI’s technology, the user can attain the highest level of accuracy with long-term high performance as demanded of the stringent medical industry.  Mating with the MEMS pressure sensor is a state-of-the-art signal-conditioning IC providing full pressure calibration and temperature compensation with a user-friendly I2C digital interface. The pressure sensor housing is based on surface mount technology standards and features an industry standard JEDEC compliant SOIC-16 footprint for straight-forward PCB design and assembly. Design engineers will appreciate the design flexibility and repeatability of the SM9541 Series. Fully qualified and in production, the SM9541 is ready for design-in and user qualification.


  • Sleep Apnea (CPAP, MPAP)

  • Ventilators/Anesthesia Equipment

  • Oxygenators

  • Spirometers

  • HVAC

  • Pressure Transmitters

  • Air flow measurement

  • Respiratory equipment


  • Compensated Temperature Range: -5oC to +65oC

  • Accuracy: ±1% FS

  • I2C Digital Interface

  • 14-bit Resolution

  • Voltage Supply:  3.3 Volts

  • Complies with RoHS and REACH requirements

“We are very excited to debut the SM9541 Series to the Medical and Industrial markets. Our new MEMS sensor technology is the culmination of our low pressure expertise and we expect it will impress designer engineers,” said David Kertes, Vice-President of Sales at SMI.

About SMI

SMI is an ISO/TS16949:2009 certified premier developer and manufacturer of MEMS-based pressure sensors for a broad range of markets, with over 23 years of experience and expertise in low pressure and harsh environment pressure sensors that meet today’s stringent requirements for medical, automotive and industrial applications.  SMI’s design, production and quality control processes have enabled it to develop both the most sensitive and smallest MEMS pressure sensors available on the market today.

SMI is a member of the worldwide Elmos Semiconductor Group, offering proven solutions to a range of industries, based on application-specific ICs, sensors and complete microsystems.

SMI – Pressure Sensors

Raul Figueroa

Director of Global Marketing

+1 408.473.9797

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