MCE and MCV-Series Mass Flow Controllers come with automation protocols.

Press Release Summary:

Delivering 0-0.5 sccm to 0-20 slpm full scale gas flow rates, MCE and MCV-Series Mass Flow Controllers offer 20 to 50 millisecond control response time. Designed with EtherNet/IP and DeviceNet protocols, unit’s automation protocols enable real time mass flow, volumetric flow, absolute pressure and temperature with temperature and pressure compensation. Unit’s integrated shut-off valve comes with positive shut-off of 1 x 10^9 atm-sccm/sec.

Original Press Release:

Alicat Adds Industrial Automation Protocols to Vacuum Flow Control Instruments

EtherNet/IP and DeviceNet options integrate mass flow instruments into coating and sputtering process control

Alicat Scientific has expanded the communications protocol offerings on its line of mass flow controllers for vacuum coating applications, adding EtherNet/IP and DeviceNet. Alicat’s MCE-Series and MCV-Series mass flow controllers ensure the optimal coating environment in vacuum chambers, maintaining product integrity in vacuum deposition.

The new industrial automation protocols enable real time data–including mass flow, volumetric flow, absolute pressure and temperature, with full temperature and pressure compensation– to be read centrally by the PLC and used to manage the MCE- and MCV-Series instruments. Users may change setpoint or gas selection, and issue other commands to Alicat instruments using a DeviceNet or EtherNet/IP enabled PLC or computer.

The Alicat MCE and MCV accurately control gas flow rates as low as 0-0.5 sccm full scale or as high as 0-20 slpm full scale and are capable of 20 to 50 millisecond control response times. Fast response times can greatly improve vacuum coating end products and help eliminate target poisoning. The integrated pneumatic shut-off valve is normally closed, affording positive shut-off of 1 x 10^9 atm-sccm/sec Helium max.

In addition to the new EtherNet/IP and DeviceNet protocols, Alicat offers Modbus-RTU and PROFIBUS communication options. The MCE-Series and MCV-Series may be used to replace legacy and discontinued MKS instruments. Made to fit the same space as common industry mass flow controllers, both series are easy to integrate into existing systems. All Alicat instruments are backed by NIST-traceable calibration, comprehensive technical support and a lifetime warranty.

To learn more about Alicat's protocol options for vacuum coating applications, visit, or call +1 520 290-6060.

Company Profile: Part of the international Halma group, Alicat Scientific designs and manufactures mass flow devices used in medical and scientific instrumentation, as well as diverse industrial applications, for high-precision measurement and control of gas and liquid flows. Its all-digital product range includes mass and liquid flow meters and controllers; pressure gauges and controllers; portable flow meters; secondary calibration standards; software and accessories.

Alicat Scientific

7641 N. Business Park Drive

Tucson, AZ 85743 USA

Tel: +1 520.290.6060

Fax: +1 520.290.0109



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