Mass Flow Controllers offer multi-gas, multi-range solution.

Press Release Summary:

Featuring digital control architecture, P-Series/G-Series MFCs use embedded web browser application for changes in gas type and full scale flow. P-Series models, with full scale ranges from 5 sccm to 240 slm, are suited for critical mass flow applications. With integral pressure transducer, units offer pressure insensitive capabilities that maintain tight flow control in event of upstream pressure disturbance. G-Series models are intended for applications where 10 sccm to 50 slm FS range is required.

Original Press Release:

MKS Introduces P-Series and G-Series MFCs

Mass Flow Controllers provide multi-range, multi-gas solution

Andover, MA, - MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, announces the introduction of two new flow control solutions: the P-Series and G-Series multi-range, multi-gas Mass Flow Controller (MFC) families. These high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.

The P-Series MFCs, with full scale ranges from 5 sccm to 250 slm (Nitrogen equivalent) are designed for critical mass flow applications like those required in semiconductor and high end MOCVD applications. Its 1.125" width is designed for use in compact and modular gas panels. In addition to its multi-gas, multi-range capabilities, the P-Series (P9 model) with its integral pressure transducer, offers a pressure insensitive capability that maintains tight flow control in the event of an upstream pressure disturbance. The G-Series MFC is designed for a broad range of applications including solar, analytical, thin film, and vacuum processes where high performance over the 10 sccm to 50 slm full scale range is required.

The P-Series and G-Series MFCs' multi-gas, multi-range capabilities are enabled with gas parameters already stored in memory, providing tight and repeatable flow accuracy for the selected gas. An Ethernet interface facilitates changes in device range and gas, as well as remote performance monitoring. Most controllers are metal sealed and electropolished for high purity applications, and are available in a broad range of interfaces, including RS485, Profibus and Devicenet.

About MKS:

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, light emitting diodes, data storage media, and other advanced coatings. We also leverage our technology in other markets with advanced manufacturing applications including medical equipment, pharmaceutical manufacturing, energy generation, and environmental monitoring.

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