Mass Flow Controllers are IP66-rated for harsh environments.

Press Release Summary:

Designed to resist liquid/dust ingress, I-Series Mass Flow Controllers are general purpose, metal or elastomer-sealed instruments available with analog or digital I/O. Digital flow control electronics and patented thermal sensor provide 1% set point accuracy and precise flow control for full scale flow rates from 5 sccm to 50 slm or 100–250 slm, depending on model. Multi-gas/multi-range capability, enabled through onboard Ethernet interface, lets user change device gas and range.

Original Press Release:

MKS Introduces I-Series Mass Flow Controllers

IP66 Rated and Designed for Industrial Applications

Andover, Mass.,  -- MKS Instruments, Inc. (NASDAQ: MKSI), a global provider of technologies that enable advanced processes and improve productivity, announces the introduction of the I-Series of mass flow controllers designed for use in harsh environments where resistance to liquid or dust ingress (IP66 rated)  is essential. Typical applications include Biotech, Pharmaceutical, Food and Beverage production where hose down may be required, as well as industrial glass production where moisture and/or dust is present in the environment.

The I-Series mass flow controllers are general purpose, metal or elastomer-sealed instruments available with either analog (0 to 5 VDC or 4 to 20 mA) or digital I/O.  The devices incorporate the latest digital flow control electronics and a proven, patented thermal sensor and mechanical design to provide 1% of Set Point accuracy and precise control for full scale flow rates from 5 sccm to 50 slm (I50) and from 100 to 250 slm (I250).  Multi-gas/multi-range capability, enabled through the device’s on board Ethernet interface, allows the user to change device gas and range reducing inventory requirements. The I-Series is available worldwide and is supported through MKS’ global sales and technical support organization.  The I-Series is a reliable and cost effective solution for today’s rigorous industrial applications.

About MKS Instruments

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, light emitting diodes, data storage media, and other advanced coatings. We also leverage our technology in other markets with advanced manufacturing applications including medical equipment, pharmaceutical manufacturing, energy generation, and environmental monitoring.

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