Linear Stages target surface metrology applications.

Press Release Summary:

Available in 100, 200, and 300 mm models with all-steel construction, FMSxxHA Series combines high stiffness and thermal stability for precise and repeatable measurements. Units have precision-ground, steel ball screw for high-speed motion, and crossed roller bearings with anti-creep feature, minimizing measurement noise and variability. Stages are driven by stepper motor, with linear encoder that provides on-axis accuracy down to 1 µm and sub-micron bi-directional repeatability.

Original Press Release:

Newport Introduces Higher Accuracy, FMS Linear Stages for Metrology

Irvine, CA – Newport Corporation, a worldwide leader in laser and photonic solutions that Make, Manage and Measure Light®, introduces the last installment of high accuracy FMS stages for higher-end metrology applications.  Developed specifically to address the needs of surface metrology applications, the FMSxxHA stages are available in 100, 200 and 300 mm models. Similar to the original FMS stages, these HA versions also feature smooth motion, low noise, high straightness and flatness.

With all-steel construction, the FMS Series combines high stiffness and thermal stability for robust, highly precise, and repeatable measurements. The crossed roller bearings in the FMS have an anti-creep feature to provide exceptionally smooth and straight motion, reducing measurement noise and measurement variability. The precision-ground, steel ball screw is designed for high-speed motion, enabling higher throughput.  The FMSxxHA is driven by a stepper motor, with a linear encoder that provides exceptional on-axis accuracy down to 1µm and sub-micron bi-directional repeatability.

For added flexibility in gathering metrology data, the FMS Series is compatible with Newport's high-performance 8-axis XPS Universal Controller, an ESP-compatible, integrated controller/driver.  Newport's new FMSxxHA product is ideal for surface metrology, surface profilometry and tribology applications.  For more information about the new HA version, please visit:

About Newport Corporation

Newport Corporation is a leading global supplier of advanced-technology products and systems to customers in the scientific research, microelectronics manufacturing, aerospace and defense/security, life and health sciences and precision industrial manufacturing markets.  Newport’s innovative solutions leverage its expertise in high-power semiconductor, solid-state and ultrafast lasers, photonics instrumentation, sub-micron positioning systems, vibration isolation, optical subsystems and precision automation to enhance the capabilities and productivity of its customers’ manufacturing, engineering and research applications. Newport is part of the Standard & Poor’s SmallCap 600 Index and the Russell 2000 Index.

Company Contacts:

Kim Abair

Director, Global Marketing

Tel: 800-222-6440 / +1 949-863-3144


Beda Espinoza

Sr. Manager, Motion Products

Tel: 949-253-1247


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