Linear Stage provides 100 mm travel and 4 nm resolution.
Press Release Summary:
Combining features of piezo-flexure and dc-servo/ballscrew drives, Model M-511.HD hybrid nanopositioning translation stage suits applications in nano-metrology, surface inspection, microscopy, laser technology, and interferometry. Integrated C-702 hybrid controller handles encoder count rates of 100 mil pulses/sec. With 100 kg load capacity, unit features active compensation of stick/slip during startup and settling, active backlash compensation, and velocity control.
Original Press Release:
Hybrid Nanoprecision Linear Stage Provides 100 mm Travel, 4 nm Resolution
Auburn, MA, - Feb 2007 - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for nanotechnology, photonics, semiconductor and life science applications, offers the M-511.HD hybrid nanopositioning translation stage. The new hybrid system overcomes the limitations of conventional precision positioning systems by combing the well-known piezo-flexure-drive advantages of unlimited resolution & rapid response with the long travel ranges and high holding forces of a servo-motor / ballscrew arrangement.
Typical Applications
Nano-Metrology, Surface Inspection, Microscopy, Laser Technology, Interferometry
Features & Advantages
o Combines Advantages of Piezo-Flexure Drives & DC-Servo / Ballscrew Drives
o Long Travel Ranges to 100 mm
o 4 Nanometer Linear Encoder Resolution
o Reliable Execution of Nanometer Level Increments
o Millisecond Settling Time to Nanometer Accuracy
o Active Compensation of Stick/Slip During Startup and Settling
o Active Backlash Compensation
o Excellent Velocity Control
o 100 kg Load Capacity
o High Holding Forces with Minimum Power Consumption
Hybrid Controller Technology is Key to Success
The highly specialized C-702 Hybrid Nanopositioning Controller reads the stage position from an integrated, 4 nm resolution linear encoder and continuously actuates both the piezoelectric and servo motor drives in a way to provide the best possible overall performance. Due to its high stiffness and instantaneous, sub-millisecond response, the integrated piezo flexure drive provides active stick/slip compensation during startup and settling. It also improves velocity control and is the key to achieving consistent and repeatable nanometer level positioning increments.
Never Miss a Count: Novel High-Bandwidth Encoder Interface
The C-702 Hybrid controller is equipped with a novel, high-speed encoder interface and can handle encoder count rates of 100 million pulses per second, without missing a single count. Thanks to its real-time operating system, the intricacies of the hybrid drive are completely transparent to the user. Interface to the host computer is via TCP/IP or RS-232; this interface makes it possible to operate and monitor the system over any TCP/IP-compatible network (intranet/internet).
