Laser-Based Process Tools aid c-Si solar cell manufacturing.
Press Release Summary:
Aethon(TM) is suited for early-stage R/D, where range of different laser-based processes are being evaluated. It includes beam scanning optics as well as software-controlled wafer positioning hardware and diagnostics. Designed for high-throughput operation, Equinox(TM) is offered in 2 formats: Equinox-Pilot configured with load/unload wafer turntable, and Equinox-Fab with multi-wafer turntable or inline horizontal mounted conveyor-belt arrangement.
Original Press Release:
New Turn Key Laser-Based Process Tools for c-Si Cell Manufacturing
Santa Clara, Calif., September 21, 2009 - Coherent Inc. (Santa Clara, CA) (Nasdaq: COHR) has released two new turnkey process tools for use in crystalline-silicon (c-Si) solar cell manufacturing production. The AethonTM and the Coherent EquinoxTM, both fully-integrated process tools, now provide a simple route for solar manufacturers to introduce laser processing for applications which enable high-efficiency cell performance. Applications include edge isolation, dielectric ablation for diffusion or plating masking, laser-assisted selective-emitter formation including dopant diffusion, emitter or metal wrap-through, and etch-barrier ablation for wet chemical surface texturing of multi c-Si wafers. These new tools can be optimized for use within R&D feasibility studies, pilot-line qualification, or high-throughput fabs, either as batch tools or fully-inline production tools.
The Aethon platform is provided for early stage R&D, where a range of different laser-based processes are being evaluated. Included within the Aethon tool is a combination of state-of-the-art high-speed beam scanning optics as well as software-controlled wafer positioning hardware and diagnostics. Aethon tools have been beta-tested at several industry-leading solar manufacturers, and form the backbone of Coherent's in-house c-Si solar cell applications development.
The Coherent Equinox tool is designed specifically for high-throughput operation, and is offered in two formats. The Equinox-Pilot is configured with a load/unload wafer turntable, and is ideally suited for production qualification of laser-based processes prior to full production line implementation. The Equinox-Fab is optimized for high-throughput production line capability up to several thousand wafers-per-hour, and is equipped with either a multi-wafer turntable for simultaneous processing or an inline horizontal mounted conveyor-belt arrangement.
To ensure maximum efficiency and ROI, all Aethon and Equinox process tools can be equipped with any Coherent nanosecond and picosecond precision manufacturing laser, including the AVIATM, TaliskerTM, and PaladinTM product lines. In addition, both Aethon and Equinox can incorporate multiple lasers as demanded by process throughput or process flexibility.
Founded in 1966, Coherent, Inc. is a Russell 2000 Index company and a world leader in providing laser-based solutions to the commercial and scientific research markets. Please direct any questions to Finlay Colville, at +44 (0) 7802 238 775, e-mail finlay.colville@coherent.com. For more information about Coherent, including product and financial updates, visit our website at www.Coherent.com.
