Interferometer delivers high-precision 3D topography.
Press Release Summary:
Using correlation algorithm to find coherence peak position of interference pattern produced by selectable bandwidth light sources, Talysurf CCI 3000A delivers 3D surface texture, step-height, and micro-dimensional measurements in seconds. Unit can analyze polished, rough, specular, or scattered components having 0.3-100% reflectivity. With 0.1 angstrom measurement resolution, it measures components up to 300 mm² in size and specimen areas up to 7 mm² without stitching.
Original Press Release:
Talysurf CCI 3000A From Taylor Hobson Delivers the Ultimate in High-Precision 3D Topography
LEICESTER, ENGLAND--Taylor Hobson, an acknowledged leader in metrology design and manufacturing, has introduced the Talysurf CCI 3000A Coherence Correlation Interferometer that sets new standards in 3D surface analysis with 0.1angstrom measurement resolution.
The Talysurf CCI 3000A delivers the ultimate in high-precision 3D topography. The instrument combines the surface imaging quality of a microscope with the high-accuracy measuring capability of a surface profiler. The result is precise 3D surface texture, step-height and micro-dimensional measurements that are available to users in seconds, making the instrument an invaluable tool for super-polished optical components, semiconductor fabrication, MEMS and other applications.
The Talysurf CCI 3000A uses a patented correlation algorithm to find the coherence peak position of an interference pattern produced by selectable bandwidth light sources. This method provides both high resolution and excellent sensitivity to returning light. Excellent data resolution in X and Y axes, combined with a very low missing data rate, contribute to outstanding system performance.
The instrument is highly versatile. It can analyze without difficulty polished, rough, specular or scattered components having between 0.3% and 100% reflectivity as well as a wide range of materials, including glass, metal, photo resist, polymer, liquid inks and pastes. Its composite granite and welded-steel construction assures stability throughout the measuring loop, while a pneumatic anti-vibration system isolates the instrument from external vibrations.
Measurement set up is easy. A user simply places a component onto the positioning stage, sets the focus height and pushes the start button. Components need only be free of contamination. Artifacts traceable to international standards are used to calibrate the instrument's vertical and lateral measurement axes. The geometrical, dimensional and surface characteristics of any known artifact can therefore be easily reproduced with authority and confidence.
Preparation and staging of the component is greatly simplified because the measured data can be software leveled and aligned. The device can measure components up to 300mm2 in size and specimen areas up to 7mm2 without stitching. Height adjustments of 100mm allow inspection of parts held in processing jigs, vacuum chucks or other fixtures.
Detailed measurement analysis can be carried out with the press of a button. Surface features defined by diameter, area or volume can be automatically identified, measured and sorted. Internationally recognized waviness and roughness parameters in both 3D and 2D are included, and dimensional measurement in X, Y and Z axes provided.
Presentation tools include user-defined scale, viewing angle and rotation, plus photo-realistic images in monochrome or full-color providing a natural view of 3D planar surfaces. A full package of desktop publishing tools, including templates for repetitive tests, helps assure consistent, comprehensive documentation of measurement results and analysis.
Taylor Hobson is a leading manufacturer of ultra-precision measurement instrumentation for a variety of markets, including optics, semiconductors, hard disk drives and nanotechnology research. It was acquired in June 2004 by AMETEK, Inc, a leading global manufacturer of electronic instruments and electric motors, with annual sales of more than $1 billion. Taylor Hobson joins AMETEK as part of its Electronic Instruments Group (EIG) --a recognized leader in advanced monitoring, testing, calibrating and display instruments.
For more information on the Talysurf CCI 3000, contact Taylor Hobson, 2100 Golf Road, Suite 350, Rolling Meadows, Illinois 60008-4231, USA. Tel: 847-290-8090. Fax: 847-290-1430. E-mail: sales@taylorhobson.us
