Inspection System provides high-speed surface measurement.
Press Release Summary:
Siscan(TM) fully automatic, confocal, 3D inspection system provides process-synchronized, 100% inspections in manufacturing environment. It achieves throughput of 21.6 wafers/hr, referred to 8 in. reference wafer with more than 227,240 bumps, as well as x/y resolution of 10 micrometers and z-axis accuracy of 500 nm. Siscan can also be used for inspection of fine laser welds on high-pressure injection valves in automotive industry.
Original Press Release:
Siscan(TM)-the world's fastest high-precision, fully automatic confocal 3D inspection system-further improved
Siscan is a high-resolution optical 3D inspection system for surface measurement. The measuring speed of the Siscan 3D inspection system from Siemens Dematic Electronics Assembly Systems in Munich (Germany) has been further increased. Siscan now achieves a throughput of 21.6 wafers per hour, referred to an 8-inch reference wafer with more than 227,240 bumps, as well as an x/y resolution of about 10 micrometers and a z-axis accuracy of 500 nanometers at six sigma. The most reliable optical measuring method is now also available for process-synchronized manufacturing inspection applications.
Based on the patented microscopy technology from Siemens, it was possible to increase the measuring speed by more than a factor of 1,000 compared to conventional confocal microscopes. This makes the most reliable optical 3D measuring method also available for process-synchronized, 100 per cent inspections in the manufacturing environment. The Siscan systems are currently used for the 3D measurement of bumps on wafers in the semiconductor industry, as well as for the inspection of fine laser welds on high-pressure injection valves in the automotive industry. The extreme reliability, which is far higher than with any manual optical inspection process, enables significant improvements of the delivered quality in the fields of application.
The measuring method can also be used in other areas, such as biology and micromechanical engineering, because it is able to measure even objects which are either highly or very poorly reflective with a z-axis accuracy of 500 nanometers.
Siscan is not only available to end customers but can also be integrated into existing equipment as a sensor system.
Siemens Dematic AG with headquarters in Nuremberg/Germany, is the world leader in logistics and plant automation. As a systems integrator, Siemens Dematic supplies the full range of products and services, from individual products and systems to complete turnkey facilities as a general contractor. Siemens Dematic consists of three divisions: Postal Automation, Material Handling Automation, and Electronics Assembly Systems. The company, with approximately 11,000 employees worldwide, has a business volume of around 3 billion euros. For more information about Siemens Dematic go to www.siemens-dematic.com.
Further information can be found on the Internet at: www.mechoptronics.com.
