ICP System provides etching over variety of materials.

Press Release Summary:



Incorporating Shuttlelock® SLR technology, repackaged with updated, tier one components, Apex SLR is suited for wide range of uniform Inductively Coupled Plasma etch applications. Load lock system features 4-button control for processing in less than 1.0 m² footprint. Built and controlled with PLC and DeviceNet software, Apex SLR is available with both laser and optical emission spectroscopy endpoint technologies to augment processing capability.



Original Press Release:



Advanced Vacuum Releases Apex SLR



A HIGHLY RELIABLE, EASILY MAINTAINED, AND ROBUST PLATFORM FOR ICP PROCESSING



Lomma, Sweden, – Advanced Vacuum releases the Apex SLR, a robust ICP system based on Plasma-Therm’s proven Shuttlelock® (SLR) platform with a much smaller footprint. With many years of proven SLR technology and an extensive process library, users will be able to ‘hit the ground running.’ With over 50,000 cycles of testing, the Apex will provide the reliability and availability researchers expect and need.



Thomas Engstedt, CEO for Advanced Vacuum remarked, “The Apex SLR is a welcome addition to the products offered by Advanced Vacuum. This tool expands and compliments our product portfolio with a logical extension into high density ICP plasma processing. This ICP system is a perfect fit for R&D and pilot production and maintains our leadership in providing innovative and cost effective processing platforms. He continued, “We’re excited to offer a highly capable and robust system based on the well-established and proven SLR technology.”



With a small footprint, high reliability, ease of use, and ergonomic design, the Apex SLR is ideal for a wide range of uniform, high quality ICP etch applications. The Apex SLR is a load lock ICP system with an easy 4-button control for processing in a <1.0 m2 footprint. The Apex SLR was designed incorporating Plasma-Therm’s Shuttlelock® SLR technology, repackaged with updated, tier one components. Built and controlled with trusted PLC, DeviceNet software on a Windowsbased operating system, the Apex SLR achieves high uptime with low, simple maintenance.



The Apex SLR is backed by Plasma-Therm’s 15 continuous years of VLSI awards for customer satisfaction and the global service network is ready to install and support the Apex SLR anywhere worldwide.



Jim Pollock, Exec. VP of Sales for Plasma-Therm comments, “The introduction of the Apex SLR will enhance Advanced Vacuum’s positioning in served markets and will make high value technology accessible to researchers at an affordable price. The SLR ICP has long been a respected tool in the industry for its reliability, low maintenance and repeatable processing.



Reintroduced by Advanced Vacuum in a smaller footprint, the Apex SLR will continue that same legacy for years to come.”



About Advanced Vacuum

Founded in Sweden in 1993, Advanced-Vacuum develops and supplies vacuum solutions, ranging from reliable plasma etch and deposition systems to innovative chemical pump systems to high performance thermal/vacuum environmental test chambers. Acquired in 2011 by Plasma-Therm, Advanced Vacuum provides platforms for critical research and development, prototyping, and low volume production in the areas of semiconductors, material science, component testing, and failure/yield analysis. Advanced Vacuum solutions for custom applications, upgrades, and retrofits are well known throughout the vacuum equipment industry. Please visit www.advanced-vacuum.com for more information.

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