I/O Interface conforms to SEMI-S2 safety requirements.

Press Release Summary:



Model CDN127 digital peripheral device interface supports 8 fail-safe digital inputs/outputs, 2 analog inputs, 2 analog outputs, and electromechanical relay interlocks. Module converts non-DeviceNet(TM) peripheral devices to DeviceNet. CDN127 operates as Group 2 slave on DeviceNet network. Device Profile for CDN127 is based on DeviceNet Vacuum Dry Pump Device Profile, Revision 1.7.



Original Press Release:


MKS DeviceNet I/O Interface Supports Communication with Peripheral Devices and Integrates into Existing Interlock Strategies on Semiconductor Processing Equipment


The CDN127 digital peripheral device interface supports eight digital inputs/outputs, two analog inputs and two analog outputs, as well as electromechanical relay interlocks.

February 1, 2002, Riverside, Calif-MKS Instruments, Inc., the world's broadest provider of process infrastructure products and technologies that increase productivity in gas- and vacuum-based manufacturing, announces a new peripheral device interface module that converts non-DeviceNet(TM) peripheral devices to DeviceNet. The MKS D.I.P.T Products CDN127 is the latest in a series of DeviceNet-compatible interfaces for enhanced digital communication and productivity for semiconductor manufacturers and manufacturers of auxiliary equipment such as vacuum pumps, process generators/power supplies, heat exchangers, chillers and compressors commonly used on semiconductor processing tools. The CDN127 supports eight fail-safe digital inputs/outputs, two analog inputs, and two analog outputs. In addition, it provides added flexibility by easily integrating into end-user Interlock strategies utilizing electromechanical relays. This Interlock capability conforms to SEMI-S2 requirements for safety.

With eight configurable digital inputs/outputs and 12-bit analog inputs/outputs, the CDN127 operates as a Group 2 slave on a DeviceNet network. The Device Profile for the CDN127 is based on DeviceNet Vacuum Dry Pump Device Profile, Revision 1.7. This profile has been extended to support the additional analog and digital outputs and analog inputs available on the CDN127.

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