High Flow Filters supports transition to 450 mm wafer equipment.

Press Release Summary:

Respectively accommodating 300 and 600 slpm flow rates in filter lengths of 3.31 and 5.0 in., Defender Series all-metal gas filter meets Semi requirements for 9 LRV (99.9999999% efficiency) down to 0.003 µm at recommended flow rate. Degree of pressure drop allows reduction of vacuum conductance, accelerating wafer chamber evacuation and fill. Supporting diverse applications in semiconductor industry, filters have operating pressures to 2,500 psig and operating temperatures to 450°C.

Original Press Release:

Mott Defender High Flow Filters for 450 mm Semiconductor Tools

FARMINGTON, CT - Mott Corporation announces their newest all-metal filter design that accommodates the smallest high purity gas filter footprint to date. This filter design is the only one available that meets the Semi requirements for 9 LRV (99.9999999% efficiency) down to 0.003 µm at the recommended flow rate. It was specifically developed to support the industry's transition to 450 mm wafer equipment.

As part of Mott's Defender Series Filters, this filter can accommodate flow rates of 300 slpm in filter length of 3.31 inches (84 mm) or 650 slpm (127 mm) in lengths of 5.0 inches. This all-metal filter provides an extremely low pressure drop for the reduction of vacuum conductance allowing for fast wafer chamber evacuation and fill. And with operating pressures up to 2,500 psig and operating temperatures up to 450°C, the Defender Series can support virtually every application in the semiconductor industry.

Mott is the first to offer an all-metal gas filter that can provide these efficiencies and these very high flow rates in such small footprints. As the semiconductor, flat panel display and photovoltaic industries look to increase flow requirements in their manufacturing processes, Mott filters are there to meet the challenge.

Mott Corporation design teams have been engineering solutions and developing the technology of porous metal for over 50 years. This newest innovative development attests to Mott's unique ability to modify current geometries and designs to accommodate performance and industry requirements.

As the leading worldwide manufacturer of quality all-metal gas filtration and flow control products for the semiconductor industry, Mott offers the most complete range of all-metal filter products available in the market today. From large bulk gas filter systems capable of handling the highest flow rates, down to sub-liter per minute flow devices, these products come with the best warranty in the industry.

For additional information regarding Mott Corporation and its High Purity Products, please feel free to contact Sales and Marketing, 84 Spring Lane, Farmington, CT 06032, Phone: 860-747-6333 / Toll Free 1-800-BUY-MOTT / E-Mail: [email protected] or visit our website at www.mottcorp.com.

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