High performance for superior thin films
SCASAR - HUETTINGER's new medium frequency generator, now offers a cost-effective alternative to pulsed DC processes. A world market leader in generators for large area coatings, HUETTINGER has applied their decades of experience to this modular generator concept, which was presented for the first time at the "6th International Conference on Coatings on Glass and Plastics" in Dresden, Germany from June 18 to 22, 2006.
Flexibility equals increased productivity
SCASAR features HUETTINGER's arc management systems ARCtelligent(TM) and ARCgenious(TM). These new technologies, coupled with very low stored energy, enable
the deposition of ultra-thin homogeneous films. With values of less than five millijoules per kilowatt, the SCASAR is an ideal energy source for deposition of materials with low melting points. Different levels of arc management may be selected depending on the process conditions required by the substrates and targets being utilized. Thus, film quality and production throughput can be optimized. Connecting cooling media, power and process data supply has also been designed for flexibility, making integration of the SCASAR into plants and systems fast and easy. Serviceability is enhanced by the unit's modular design which allows for rapid exchange of the power units with virtually uninterrupted operation.
SCASAR is available in power levels of 25, 50, 75 and 100 kilowatt (kW) at output frequencies between 20 and 70 kilohertz (kHz). Interface options include Analog/Digital, RS232 and Profibus. This unique combination of features makes the SCASAR series suitable for use in a wide range of applications, and especially for deposition process with dual magnetrons.
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