Gigaphoton Announces 500th Milestone Installation of Advanced ArF Light Source at Samsung


Underscores Growing Industry Adoption of Company's Technology For Tackling Next-Generation Lithography Applications

OYAMA, Japan, June 28 / / -- Gigaphoton Inc., a major lithography light source manufacturer for the global semiconductor industry, today announced the installation of its 500th excimer laser light source at Samsung Electronics Co., Ltd. Today's achievement underscores the industry's continued adoption of Gigaphoton's light source technology as essential for addressing next-generation lithography applications. The milestone installation is for Gigaphoton's GT40A, which was integrated into one of its OEM customers' state-of-the-art ArF lithography tools.

Commenting on today's milestone, Gigaphoton President, Dr. Yuji Watanabe, noted, "This installation at Samsung marks a momentous accomplishment for Gigaphoton, as it demonstrates growing acceptance of our advanced ArF light sources in tackling next-generation lithography applications. We are happy that our 500th tool was installed at Samsung, who is not only one of today's top leaders and innovators, but also one of our most valued end-customers. In fact, we have worked closely with Samsung to enhance our light source offerings to ensure our solutions continue to deliver the superior quality, reliability and high throughput required from their lithography processes."

Gigaphoton's laser shipments continue to increase, and its market share has continued to grow at a rapid-fire pace since its inception in 2000. Testament to its strong laser sales, the company reports it has installed more than 100 lasers in the last 12 months. Furthermore, the company reports its revenue has grown by more than 80 percent as it continues to claim an increasing share of the excimer laser market, of which it commands an approximate 30-percent stake (based on laser sales revenue in 2006).

Gigaphoton's GT40A is a 4kHz, 45W, ArF excimer light source, offering a spectrum below 0.50pm (E95), enabling advanced lithography tools to print circuit patterns 65 nm and below. The GT40A leverages an injection-locking resonator to allow simultaneous maintenance of narrower spectral bandwidth and higher output -- a combination that is difficult to achieve with conventional technologies. In addition, it provides lower peak-pulse energy that reduces damage to a lithography tool's optics to achieve the lowest running cost in the industry. Gigaphoton's GT40A is also equipped with advanced self-diagnostics and offers ease of serviceability to ensure high reliability and uptime.

About Gigaphoton

Gigaphoton Inc. was founded in 2000 as a joint venture of Komatsu Ltd., the world's No. 2 construction machinery manufacturer, and Ushio Inc., the world's No. 1 lithography lamp manufacturer. Since then, Gigaphoton has been developing and marketing user-friendly, highly innovative laser light sources that make a great contribution to lithography technology so as to meet the stringent requirements of the ultra-fine circuit patterns of the gigabit era, and is delivering them to major lithography tool suppliers in the global semiconductor industry. As the world's no. 2 excimer laser light source manufacturer, Gigaphoton holds a strong position in the Asian market, including Japan, while also continuing to enjoy rapid growth in the U.S. and European markets. More information about Gigaphoton can be found on the company's website at http://www.gigaphoton.com/.

The company name, logo, and designations GT40A are trademarks of Gigaphoton, Inc. The content of this release may be revised without prior notice. Gigaphoton shall not be liable for updating or announcing a correction if the content of this release is changed for any reason in the future.

Source: Gigaphoton Inc.

CONTACT: Hideichi Satou, +81-285-28-8410, or fax, +81-285-28-8439, hideichi_satou@gigaphoton.com, or Yutatsu Matsui, +81-285-28-8415, or fax,
+81-285-28-8439, sales@gigaphoton.com, both of Gigaphoton, Inc.

Web site: http://www.gigaphoton.com/

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