Gas Cleaning Module cuts laser startup time.
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Press Release Summary:
NovaGasPurifier(TM) filtering device for Lambda STEEL(TM) industrial excimer lasers does not require He-compressor or water cooling like company's existing cryogenic gas purification systems, so it does not require 50-min. cool down phase. Instead, it is immediately operational. This cuts start up time, reduces window contamination, and increases average gas lifetimes. Lambda STEEL 1000 and STEEL 670 lasers in field can be easily upgraded with module.
Original Press Release:
New, Highly Efficient NovaGasPurifier(TM) Increases Up-time For Use in the Industrial Excimer Laser Series - Lambda STEEL(TM )
March 15, 2002, Fort Lauderdale, FL - Lambda Physik has introduced a new gas cleaning module for use in the Lambda STEEL (STable Energy Excimer Laser) industrial excimer laser series. The NovaGasPurifier is a newly designed filtering device that does not require a He-compressor or water cooling. In contrast to the existing cryogenic gas purification systems that require a cool down phase that takes approximately 50 minutes for XeCL, the NovaGasPurifier is immediately operational. Not only is laser start-up time significantly cut, but extraordinarily reduced window contamination and average gas lifetimes of 100 million pulses have also been reported.
All newly manufactured Lambda STEEL lasers will be equipped with the NovaGasPurifier. Lambda STEEL 1000 and STEEL 670 lasers in the field can be easily upgraded with the new module. The NovaGasPurifier is another step in enhancing the laser up-time for high throughput and high duty-cycle industrial production, while simultaneously decreasing the running costs.
The possible applications for Lambda STEEL series are numerous; reaching from the field of material processing by microstructuring to microdrilling, with a resolution of a few micro m obtainable by common mask techniques, to manipulating surface or material properties, e.g. hardening, passivation or recrystallization. Recrystallization is the most prominent example for applications using Lambda STEEL, namely Excimer Laser Annealing (ELA) for low temperature poly silicon TFT LCD Flat Panel Display production.
The Lambda STEEL lasers have already successfully been assigned to production lines for the production of TFT-LCD displays and based on performance, exemplify high reliability and extraordinary stable beam parameters.
Lambda Physik is the worldwide technology leader for pulsed UV and tunable laser sources for industrial, lithography, science and medical applications.
For more information, contact Lynn Kobel, Marketing Communications Manager, Lambda Physik Inc., 3201 West
Commercial Boulevard, Fort Lauderdale, FL 33309, Phone: (954) 486-1500, Fax: (954) 486-1501, Email:
marcom@lambdaphysik.com, Web site: www.lambdaphysik.com
