Gas Analyzer checks residual gas in vacuum systems.

Press Release Summary:



PC-controlled REGA quadrupole mass spectrometer measures residual gas in PVD systems and high vacuum pumping equipment, performs gas analysis for PVC processes and thermal desorption spectroscope studies, and functions as in-situ system helium leak detector. Its analyzer head reads total pressure, eliminating need for separate hot cathode ionization vacuum gauge. Control unit operates on 24VDC, and comes with RS232, external I/O, and interlocks.



Original Press Release:


ULVAC Technologies, Inc. Introduces REGA Residual Gas Analyzer


Methuen, Mass. - ULVAC Technologies, Inc. (www.ulvac.com), a leading supplier of production systems, instrumentation, and vacuum pumps for a variety of industries, offers its Residual Gas Analyzer (REGA) for vacuum quality control. This quadrupole mass spectrometer is a PC-controlled 2-200 M/e mass analyzer. The REGA is ideal for residual gas analysis in PVD systems and high vacuum pumping equipment, gas monitoring of PVD systems, process gas analysis for PVC processes, thermal desorption spectroscope studies, and various types of gas analysis in research and development applications. The REGA can also function as an in-situ system helium leak detector. Additionally, its analyzer head is designed to read total pressure, thereby eliminating the need for a separate hot cathode ionization vacuum gauge.

The REGA control unit operates on 24VDC and comes standard with RS-232C external I/O inputs, outputs and external interlocks. In addition to the RS-232C, the optional RS-485 communication to a PC-based Windows NT 4.0 platform allows up to 32 REGA systems to be connected to a single PC node. The software features easy operation and data collection.

Other options include a Faraday cup or SEM detectors for greater sensitivity. differential dry pumping with a wide-range turbomolecular/diaphragm pumping package, a portable stand with adjustable height, a heater jacket, and a gas inlet valve.

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