Flow Controller facilitates chemical blending.

Press Release Summary:



Model NT® Integrated Flow Controller helps semiconductor equipment makers enable chemical handling and blending as close to point of use as possible. DeviceNet(TM) communications protocol delivers diagnostics for monitoring, trouble-shooting, and problem-solving, helping to keep fabs up and running.



Original Press Release:



Entegris Integrated Flow Controller Outpaces Competition



Company's NT® Unit Smallest IFC On The Market Today

CHASKA, Minn., July 11, 2005 - Entegris, Inc. (Nasdaq: ENTG) introduces its NT® Integrated Flow Controller (IFC) Model 6510 at SEMICON West July 12-14. The NT ® IFC is a technological advancement that helps semiconductor equipment makers enable chemical handling and blending as close to the point of use as possible.

"With superior advantages in terms of size, diagnostics capability and performance, this product brings a more complete solutions set to customers who want to stay at the leading edge of industry trends in chemical handling and blending," said Chad Ruwe, Entegris vice president for semiconductor marketing. "By enabling better control of the chemical blend, our IFC provides advanced process control of chemicals, cuts down on chemical waste, and lowers chip manufacturing costs."

The reduced footprint of the NT® IFC 6510 saves valuable space in liquid handling systems and allows toolmakers to integrate more process functionality. The unit's DeviceNet(TM) communications protocol delivers advanced diagnostics to monitor, trouble-shoot and problem-solve to keep fabs up and running. The product performs at the highest degree of accuracy and reliability so manufacturers are able to effectively employ dilute chemical solutions at the point of use.

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