Flat-Field Spectrometer suits EUV and soft X-ray
Press Release Summary:
Optimized for Extreme Ultraviolet (EUV) and Soft X-ray wavelength regions, flat-field toroidal grating instrument works over 2 fixed wavelength ranges. Gratings are available for 1-5 nm and 5-20 nm. Angle of incidence and aberration corrections are optimized for area of interest, and effective blaze wavelengths are 1.6 and 10 nm, respectively. Geometry allows use of CCD detectors for direct detection and microchannel plate intensifiers for systems that require gating.
Original Press Release:
Flat-Field Spectrometer for Extreme Ultraviolet and Soft X-ray
McPherson, Inc. spectrometers optimized for the Extreme Ultraviolet and Soft X-ray wavelength region. Extreme Ultraviolet (EUV) plasma investigators and light source developers consider a dedicated wavelength range of analysis surrounding the Xenon emission at 13.5-nm. The new flat field toroidal grating instrument fits this requirement well. It works over two fixed wavelength ranges. Gratings are available for one to 5 nanometers and five to 20-nm (248 to 62-eV.) The angle of incidence and aberration corrections are optimized for the area of interest. The effective blaze wavelengths are about 1.6 and 10-nm respectively. This instrument allows users to work with a relatively simple optical system that delivers good imaging and spectral resolution. The geometry will also allow use of high-sensitivity CCD detectors for direct detection. Microchannel plate (MCP) intensifiers can be employed for systems requiring gating.
The McPherson flat-field imaging grating spectrometer is a practical tool for investigations in the Extreme Ultraviolet. For example, it finds use in Lithography (EUVL) light source development (e.g. laser excited Xenon and other plasma at 13.5-nm) and for diagnostics of short lifetime plasmas, as those formed in tokamak devices.
