Exhaust Management Systems feature idle mode.

Press Release Summary:




ATLAS(TM) and TPU families of combustion exhaust management systems are available with idle mode that allows abatement systems to go into standby mode with reduced fuel and water consumption when exhaust is not flowing from attached process equipment. Available with 1-6 inlets, ATLAS systems provide exhaust management for CVD and etch processes (PECVD, HDPCVD, and WCVD), and are suited for treating exhaust streams containing fluorine (PFCs), SiH4, TEOS, WF6, and NH3.



Original Press Release:



Edwards Announces New Idle Mode Availability for ATLAS(TM) Exhaust Management Systems



New idle mode is part of Edwards' corporate initiative to reduce the operational costs of vacuum and abatement equipment

WILMINGTON, MASS (11 December 2007) - Edwards, a leading global supplier of vacuum, abatement and chemical management equipment and services, today announced the availability of "idle mode" for its ATLAS(TM) and TPU families of combustion exhaust management systems. Idle mode allows the abatement system to go into a standby mode with reduced fuel and water consumption when exhaust is not flowing from attached process equipment. The new capability is part of a continuous improvement program initiated by Edwards to reduce the operating costs and environmental impact of its vacuum and abatement systems.

In idle mode, the system only consumes fuel to maintain the pilot flame and water to refresh the recirculation system once an hour. On an ATLAS, these levels represent a reduction of 89 percent for fuel and nearly 100 percent for water. Idle mode can also be provided as an upgrade to existing TPU systems where even higher percentage fuel reductions can be made. With equipment utilization typically 85 percent or less (idle 15 percent or more), cost savings can be substantial. The system monitors signals from process equipment to determine active and idle status. It enters idle mode automatically and can return to full operational status within ten seconds.

"One of our corporate initiatives is to help our customers reduce the amount of energy and other utilities consumed by vacuum and abatement systems," said Nigel Hunton, Chief Executive Officer, Edwards. "This new 'idle mode' is just one step in a continuing effort to cut cost of ownership and the environmental impact of our products. When the ATLAS was introduced earlier this year, it doubled the efficiency of the burner. Other examples include advanced motor controls, optimized mechanical designs and active utility management for our pumps."

Edwards ATLAS product line (released in March 2007) uses less energy than previous-generation systems. It provides exhaust management at a minimal cost for CVD and etch processes (PECVD, HDPCVD, WCVD, etc.) and is suitable for treating exhaust streams containing fluorine (PFCs), SiH4, TEOS, WF6, NH3, and more. The ATLAS combines a highly efficient, inward fired combustion chamber and a wet scrubber to provide exceptional abatement performance with excellent powder handling. It is available with 1 to 6 inlets and with various options including temperature monitoring. The ATLAS TPU version is designed for PFC and ClF3 gas treatment, and the ATLAS Kronis for the treatment of low-k CVD exhaust streams.

The new "idle mode" is standard on all ATLAS systems, and is available as an upgrade for the TPU family and existing systems in the field.

About Edwards

Edwards (formerly BOC Edwards) is a leading supplier of integrated solutions for the manufacture of semiconductors, flat panel displays, LEDs and solar cells. It is also a world leader in vacuum technology for industrial, scientific, process and R&D applications. Edwards employs around 4,000 people globally in the design, manufacture and support of high technology vacuum and abatement equipment. Edwards invented the concept of the low-maintenance, cost-effective commercial oil-free 'dry' vacuum pump, and now supplements this with a wide range of other pumping technologies as well as related products and services.

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