Excimer Laser suits precision manufacturing and inspection.
Press Release Summary:
IndyStar(TM) industrial excimer laser produces stabilized energies of 8 mJ/pulse at 193 nm and 12 mJ at 248 nm operation at repetition rates up to 1 kHz with small beam cross-section (6 x 3 mm). It incorporates RoHS-Almeta tube technology, in which arrangement of electrode capacitors lowers charge density at electrodes without reducing output power, optimizing tube life. Laser can be used in photomask inspection, inkjet nozzle drilling, and micromachining applications.
Original Press Release:
New Compact, Industrial Excimer Laser Features Long Tube Lifetime
Santa Clara, Calif., May 27, 2008 - The new IndyStar(TM) from Coherent, Inc. (Santa Clara, CA) delivers the longest tube lifetime of any compact industrial excimer laser, providing increased reliability and lower overall cost of ownership for OEMs and end users. Specifically, the IndyStar incorporates the company's newest excimer tube design, the RoHS- Almeta, which delivers several billion pulses at 193 and 248 nm. This new ArF laser produces stabilized energies of 8 mJ/pulse at 193 nm and 12 mJ at 248 nm operation, at repetition rates up to 1 kHz with a small beam cross-section (6 x 3 mm).
The IndyStar has been designed as a next-generation replacement for the ExciStar S-Industrial excimer laser. To make upgrading effortless, all critical dimensions, power connections, computer interfaces and main performance parameter of the IndyStar are identical to the ExciStar S Industrial. Target applications for the IndyStar are in precision manufacturing and inspection, where its high repetition rate and stabilized, low-noise output are key requirements. Application examples include photomask inspection and inkjet nozzle drilling, as well as in several micromachining applications.
The new Almeta tube technology enables the IndyStar to achieve superior reliability long component lifetimes for two main reasons: First, organic materials have been eliminated from the former metal-ceramic FutureTube design. And, secondly, a change in the arrangement of the electrode capacitors lowers the charge density at the electrodes, without reducing the output power of the tube. As a result, the IndyStar offers tube lifetimes, and dynamic gas lifetimes many times longer than its predecessor. The IndyStar will be available for ArF (193 nm) and KrF (248 nm) operation.
Founded in 1966, Coherent, Inc. is a world leader in providing laser-based solutions to the commercial and scientific research markets.
For more information about Coherent, including product and financial updates, visit our website at www.Coherent.com.
Contacts: Hans-Gerd Esser
Product Line Manager
Coherent, Inc.
+49 551 6938 344
hans-gerd.esser@coherent.com
