Excimer Laser is optimized for ArF operation.
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Press Release Summary:
Compact NOVATEX(TM) features 248 nm operation and is also optimized for ArF operation, providing stabilized output energy of 6 mJ at 193 nm. Average output power of up to 6 W at 1 kHz make laser suitable for low pulse energy and high repetition rate micromachining. Laser complies with SEMI S2 standards, and features optics lifetimes of up to a billion laser pulses. Fluorine-optimized NovaTube® lasts several billion laser pulses.
Original Press Release:
Lambda Physik Introduces New 1kHz, 193 nm, Industrial Excimer Laser
FORT LAUDERDALE, FLORIDA, January 28, 2003 - Lambda Physik introduces the compact, high repetition rate industrial excimer laser NOVATEX(TM). In addition to 248 nm operation, NOVATEX is now also optimized for ArF (193 nm) operation. This new ArF excimer laser delivers stabilized output energy of 6 mJ at 193 nm. The average output power of up to 6 Watts at 1 kHz, and outstanding long-term stability make this laser ideal for low pulse energy and high repetition rate micromachining.
In order to meet high production demands from the market, maintenance time is minimized by a unique modular design. NOVATEX lasers comply with SEMI S2 standards, and feature excellent gas, optical components and tube lifetimes that have been proven by performance. Optics lifetimes of up to a billion laser pulses are achieved by employing a beam shield that can be purged. The laser offers an improved Fluorine-optimized NovaTube® which lasts several billion laser pulses and, therefore, extends system uptime and decreases cost of operation. In addition, this tube technology allows tens of millions of pulses non-stop burst or continuous operation with high-energy stability, i.e. sigma below 3%, without laser gas refill.
The applications for NOVATEX lasers include material processing by microstructuring, microdrilling, marking of cable, optics testing, surface inspection, and semiconductor inspection and metrology.
Visit us at Photonics West, Booth #1127 to see the new NOVATEX 193 nm laser. Lambda Physik is the worldwide technology leader for pulsed UV and tunable laser sources for industrial, lithography, scientific and medical applications.
For more information contact: Lynn Kobel Haddad, Marketing Communications Manager, Lambda Physik USA Inc., 3201 West Commercial Boulevard, Fort Lauderdale, FL 33309, Phone: (954) 486-1500, Fax: (954) 486-1501, Email: marcom@lambdaphysik.com, Web site: www.lambdaphysik.com
