Dry Vacuum Pumps carry ratings up to 36 cfm.

Press Release Summary:

Available with either single- or 3-phase power, Model EV-A air-cooled, dry pumps have non-contact, multi-staged roots design that lends to reliable, particle-free vacuum generation. Models EV-A03 (9 cfm), the EV-A06 (21.6 cfm), and EV-A10 (36 cfm) have water pumping capabilities when used with optional gas ballast valve. Suited for replacing wet pumps as well as scroll-type dry vacuum pumps, EV-A models can be used in such applications as load locks, PVD systems, and electron microscopes.

Original Press Release:

EBARA Introduces the EV-A Dry Vacuum Pump Series

Sacramento, California – EBARA Technologies, Inc., a leading manufacturer in the semiconductor industry for dry pumps, vacuum components and services is proud to introduce the Model EV-A Dry Vacuum Pumps to the North American market.

The EBARA Model EV-A pumps are a family of air-cooled, dry pumps that have industry-leading specifications. The series consists of the EV-A03 (9 cfm), the EV-A06 (21.6 cfm), and the EV-A10 (36 cfm) pumps.  All EV-A pumps have a non-contact, multi-staged roots design for a reliable, particle-free vacuum generation.  Available with either single-phase or three-phase power, the Model EV-A pumps have water pumping capabilities when used with the optional gas ballast valve.  Typical applications include Load Locks, PVD Systems, Analytical Instruments and Electron Microscopes. These pumps are ideal for replacing wet pumps as well as Scroll-type dry vacuum pumps.

To find out more about the new Model EV-A pumps, visit the website or contact EBARA at (800) 535-5376 or info@ebaratech.com.

About EBARA Technologies, Inc.
EBARA Technologies, Inc. is a U.S. based subsidiary of EBARA Corporation, a Japanese company founded in 1912, which provides a wide range of technologies including equipment, systems and services for water, air and the environment. EBARA Technologies, Inc. is a leading global innovator and worldwide supplier of vacuum technologies and advanced wafer-processing equipment for clean environments within the semiconductor industry. EBARA manufactures a full line of Dry Mechanical Pumps, Mag-lev Turbo and Hybrid Turbomolecular Drag Pumps for the semiconductor industry's toughest applications, including LPCVD, etch, EPI and Ion Implant. The company's offerings also include a complete line of Vacuum Valves and Fittings, Heaters for vacuum and exhaust lines, Point-of-Use Abatement systems, Ozonized water and gas equipment. Our systems group manufactures Chemical Mechanical Polishers (CMP). EBARA Chemical Plating Systems (ECP), and Through-Mask Plating Systems (ThMP). EBARA maintains a superior sales and support network in the U.S. and worldwide. www.ebaratech.com


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