Dry Vacuum Pump suits fluorine processes.

Press Release Summary:



Harsh duty, Model iH-F is available in range of peak speeds from 80-1,800 m3h-1. It includes sensing system that detects seal deterioration inside pump, allowing user to operate pump for long periods while maintaining confidence in seal integrity.



Original Press Release:



BOC Edwards Introduces New Variant of Harsh Duty Vacuum Drypump for Fluorine Processes



SAN FRANCISCO, CA (July 12, 2004)-BOC Edwards, an equipment and services provider for microelectronics manufacturers, today announced it has introduced a new variant of its world-leading iH harsh duty vacuum drypump to provide even longer overhaul intervals and increased safety in fluorine processes.

Building on the global success of the iH range of harsh duty drypumps, the iH-F variant has new features to enhance safety, reduce the effects of corrosion, and reduce the cost of ownership. All iH-F variants include an innovative sensing system to detect seal deterioration inside the pump which allows the user to operate the pump for longer while maintaining confidence in seal integrity.

iH-F variants are available in a range of peak speeds from 80 to 1800m3h-1. Upgrades to many current iH pumps are available from BOC Edwards' global service network.

BOC Edwards, part of The BOC Group plc, is a leading supplier of integrated solutions for the manufacture of microelectronics devices, including silicon semiconductors, compound semiconductors and flat panel displays. Partnering with fabs, foundries and process tool manufacturers, BOC Edwards provides process-enabling subsystems that are supported by best-in-class operations and maintenance services for its global customer base.

Serving two million customers in more than 50 countries, The BOC Group is one of the largest and most global of the world's leading gases companies. It employs over 46,000 people and had annual sales of over £4.3 billion (US $7 billion) in 2003. For more than a century BOC's gases and expertise have contributed to advances in many industries and aspects of everyday life, including steel-making, refining, chemical processing, environmental protection, wastewater treatment, welding and cutting, food processing and distribution, glass production, electronics and health care.

Information on the BOC Group can be accessed by visiting the Group web site, www.boc.com. Specific information on BOC Edwards can be accessed directly on www.bocedwards.com or e-mail: info@bocedwards.com.

All Topics