Direct-Drive Rotary Stage has low-profile, planar design.
Press Release Summary:
ABRS series rotary air-bearing stages utilize S-series slotless, brushless servomotor that exhibits zero cogging and torque-ripple free performance to promote velocity stability. Able to achieve resolutions under 0.03 arc sec, products come with direct-coupled optical encoder. Air-bearing surfaces lend to stiffness and load capacity, producing optimal axial and radial error motions as well as tilt error motion.
Original Press Release:
ABRS Series Low Profile, Direct-Drive, Air-Bearing Rotary Stages
Direct-drive slotless, brushless servomotor
Zero cogging motor for outstanding velocity stability
Outstanding error motion and wobble performance
Direct coupled, high accuracy rotary encoder
Low profile, planar design
No mechanical contact
Aerotech's ABRS series rotary air-bearing stages provide superior angular positioning, velocity stability, and error motion performance in an exceptionally low-profile package. The ABRS is designed to meet the exacting requirements of wafer inspection, high precision metrology, x-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology device fabrication.
Compact Package
The design of the ABRS series direct-drive rotary stage has been optimized to minimize stage height. The low profile of the stage reduces the effective working height of the system, minimizing "stack-up" related errors. In addition to the low overall height, the ABRS series provides a clear aperture that can be used for product feed-through, laser beam delivery, cable clearance, or application-specific requirements.
Superior Mechanical Design
The ABRS design features large air-bearing surfaces for high stiffness and load capacity, producing not only excellent axial and radial error motions, but outstanding tilt error motion, as well. The resultant face error motion is significantly better than other rotary air-bearing tables and spindles, greatly benefiting applications requiring exceptional planar performance.
Brushless Direct-Drive
To maximize positioning performance, the ABRS series utilizes Aerotech's S-series slotless, brushless motor. The motor uses an advanced magnetic circuit design to produce high torque output with minimal heat generation. The slotless design is inherently zero cogging and torque-ripple free. This makes the ABRS stages ideal for applications requiring smooth scan velocities at low or high speeds.
Accurate Positioning
An optical encoder is standard with the ABRS. When coupled with Aerotech's feedback multipliers and controls, resolutions of <0.03 arc second are achievable.
Custom Designs
Custom versions of the ABRS are available for rate table and inertial guidance test-stand applications.
For further information, please contact Steve McLane at 412-967-6854 (direct), or via e-mail at smclane@aerotech.com. In addition, the ABRS series data sheet is available at http://www.aerotech.com/products/stages/abrs.html
