Deposition Tool can be expanded and reconfigured.
Press Release Summary:
AXXIS modular, thin-film deposition tool supports processes such as sputtering, thermal evaporation, electron beam evaporation, PECVD plasma, and ion cleaning. It can heat, cool, and rotate variety of substrates and is offered in both manual and computer controlled versions.Original Press Release:
Kurt J. Kesker Company Introduces New Deposition Tool
CLAIRTON, PA. The Kurt J. Lesker Company introduces the
AXXIS-a modular thin film deposition tool which can be easily expanded and reconfigured. The AXXIS can support processes which
include: sputtering, thermal evaporation, electron beam evaporation, PECVD plasma, ion cleaning, and others. The AXXIS is capable of heating, cooling, and rotating a variety of substrates and is offered in both manual and computer controlled versions.
The Kurt J. Lesker Company is a worldwide manufacturer and distributor of standard and custom vacuum systems and equipment for research and production.
Contact: David Collins, Product Manager
Phone: 412.233.4200 Fax: 412.233.4275
E-Mail: davidc@lesker.com
Web: www.lesker.com
