Data Analysis Software provides yield management.
Press Release Summary:
Offering comprehensive capture and analysis of process performance information, Discover(TM) Data Analysis System allows manufacturers to discover and act upon yield improvement opportunities. Defect classification and spatial pattern recognition minimize time spent reviewing known defects, while statistical process control with automated reporting and alerts gets critical information to correct people. Defect signatures fed back to front-end processes can scrap bad wafers early.
Original Press Release:
Rudolph Technologies Announces New Discover Data Analysis Software
New software enhances return on inspection and metrology investments and speeds time-to-yield learning
SAN FRANCISCO, CA (July 16, 2007)-Rudolph Technologies, Inc. (NASDAQ: RTEC), a provider of yield management software, defect inspection systems and high-performance process control metrology tools for the semiconductor manufacturing industry, today introduced the Discover(TM) Data Analysis System, a next-generation software tool designed to provide comprehensive capture and analysis of process performance information, allowing manufacturers to discover and act upon yield improvement opportunities while, at the same time, reduce inspection and yield analysis costs.
Discover is the latest product to be developed by Rudolph's Data Analysis and Review Business Unit, formed to focus exclusively on software tools for yield enhancement. Discover is the next-generation yield management system designed to meet the needs of both process engineers requiring comprehensive methods of data analysis and operators that need to quickly and accurately see the quality data pertaining to their cell. This product, along with other new Rudolph systems, will be featured this week at the semiconductor manufacturing industry's annual trade show, SEMICON® West.
"Using Discover in combination with Rudolph inspection and metrology tools, engineers can increase the efficiency of the review process by twenty-five percent for normal lots and up to ninety percent for lot excursions," said Mike Plisinski, vice president and general manager of Rudolph's Data Analysis and Review Business Unit. "This is accomplished through patented review algorithms that intelligently focus the review process on the defects of interest. Discover makes it easy to drill down through the massive amount of data created by an advanced fab to identify and then store the root cause of an event. With Discover, our customers are experiencing faster inspections, fewer measurements and more accurate classification-all of which contribute to improved yield and reduced cost-of-ownership."
Discover accepts data from virtually any source: any wafer-bare or patterned; any surface-front, back, or edge; any type-inspection (micro or macro), metrology, image (optical or SEM); any process-FEOL to final manufacturing; and any tool-Rudolph or other. Intelligent sampling optimization maximizes inspection tool efficiency and throughput. Fast, accurate defect classification and revolutionary spatial pattern recognition reduce time spent reviewing known defects, allowing engineers to focus on less understood defects. Statistical process control with automated reporting and alerts is designed to get critical information to the right people, fast. Defect signatures fed back to front-end processes can scrap bad wafers early to reduce unproductive process investment.
Rudolph Technologies is a worldwide leader in the design, development, manufacture and support of high-performance process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down costs and time to market. The company has enhanced the competitiveness of its products in the marketplace by anticipating and addressing many emerging trends driving the semiconductor industry's growth. Rudolph's strategy for continued technological and market leadership includes aggressive research and development of complementary metrology and inspection solutions. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the company's web site at www.rudolphtech.com.
