Confocal 3D Measurement System features 64 channels.

Press Release Summary:




Siemens Class II SISCAN Model MC64 confocal displacement sensor uses vertically oscillating turning fork for 3D surface scanning. Able to scans surface at speeds to 80 mm/sec, it has lateral resolution of 10 microns and vertical resolution of 0.5 microns. System takes up to 512,000 measurements/sec, and throughput can be raised by using multiple sensors in parallel. Sensor has flexible measurement range up to 1.6 mm and working distance of 8.0 mm.



Original Press Release:



Metrology Resource Company Introduces a New High Speed Confocal 3D Measurement System With 64 Channels that Sets New Standards for Throughput and Quality



DETROIT, Michigan - A new confocal displacement sensor with 64 channels that uses a vertically oscillating turning fork for highly accurate 3D surface scanning within microns at an exceptional speed has been jointly introduced by Metrology Resource Company of Detroit, Michigan and Siemens Optical Solutions of Munich, Germany.

The new patented Siemens SISCAN Model MC64 sensor combines a resolution that is much higher than laser triangulation at a speed that is significantly higher than an interferometer. The sensor with standard optics scans the surface at a speed of 80 mm/second and has a lateral resolution of 10 microns. Vertical resolution is 0.5 microns.

With the capacity of taking 512,000 measurements per second, the SISCAN M64 is the world's fastest confocal microscopic 3D measurement system, according to Siemens. Defect detection is flawless and the dpm rates are very small.

The confocal combination makes the sensor ideal for high throughput production lines, process control applications, high precision quality control applications in diverse production environments in most industries and in laboratory environments. To raise the throughput rate, multiple sensors can be used in parallel.

The sensor has a wide, flexible measurement range of up to 1.6 mm, a height resolution of 0.5 microns and a lateral resolution of 10 microns. The sample rate per channel is 8,000 per second and the working distance is 8.0 mm.

Measurements made vary from height profiles with sharp peaks and fluctuations to depth profiles of small holes. Typical applications include distance, depth, or flatness measurement to measuring waviness or roughness, 3D shape inspection, bump inspection of wafers and substrates and laser weld inspection among others in industries ranging from automotive to medical, wafer, semiconductors, electronics, metals, glass, optical and aerospace.

Metrology Resource Company will market the Siemens Confocal Displacement Sensor for Siemens Optical Solutions in the U. S. and Canada.

"The sensor is ideal for manufacturing applications where a large number of components are produced," noted David Allen, Business Development Manager for Metrology Resource. "It also sets a new standard for throughput quality."

Sensor Described

The new Class II SISCAN Model MC64 confocal sensor from Metrology Resource Company and Siemens Optical Solutions consists of a scanning head with beam splitter and 64 channels, a 64-channel photodiode detector, a vertical oscillating mirror that turns and system electronics.

With the confocal measurement principle, the sensors projects a 1.0 micron spot onto the surface. The optical system refocuses the reflected light on to a detector equipped with a pinhole and analyzes the maximum light intensity and high speed, high resolution scanning regardless of surface conditions. Up to 8,000 profiles are made a second.

A software package with three different display modes is standard. The package includes a color-coded height image, an intensity range and a height profile/intensity profile combination. Data can be exported to most analysis programs and presented in the form of a 3-D histogram.

For applications where a large number of precision components are produced, an optical SISCAN MC64 Topographer is optional. This system consists of a granite table, X/Y positioning unit and SISCAN Model MC64. The system is well suited for quality control and production applications.

Siemens Optical Solutions delivers customized inspection solutions from a single source, including mechanical inspection modules and interfaces to the program machine controller.

"We are pleased to be able to work with Metrology Resource to introduce this product into the US market," noted Erik Oliver Eyb, Business Development Manager of Siemens Optical Solutions. "It is truly a unique product that no other company can currently offer industry."

About Metrology Resource Co.

Metrology Resource Co. distributes a wide range of sensors varying from surface scanners for the visual check of object surfaces for scratches, pores, pits, voids and other such variables, to single point sensors such as auto focusing, co focal and triangulation to White Light Interferometers.

For more information on Siemens Confocal Displacement Sensors in a single point or 64-point beam laser, contact Metrology Resource Company, 837 South Lapeer Rd., Suite 207, Oxford, MI 48371 call 1-800-660-2680 or (248) 628-8671, FAX 248-628-8712 or e-mail david@metrologyresource.com. Metrology Resource can also be found on the web at www.metrologyresource.com.

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