Clean Process Oven for semiconductor industry.

Press Release Summary:



LCC2-14 has chamber volume of 14 cu ft, large enough to handle thermal processing of 200 and 300 mm semiconductor wafers. It has stainless steel interior with continuously welded seams to protect work chamber from contamination. Oven is SEMI S2 and CE compliant, can be configured for multiple voltages and 50/60 Hz, and has UL and C-UL listed open control panel with lockable disconnect switch. With Protocol Manager(TM) software, oven controllers can be networked.




Original Press Release:



New LCC2-14 Clean Process Oven from Despatch Ideal for Production



MINNEAPOLIS - May 13, 2002 -Despatch introduces the new LCC2-14 Clean Process Oven, designed especially for production environments. The LCC oven's development was a collaborative effort between the Despatch clean process oven team and end users in the semiconductor and electronics industries. As a result, the new design offers a long list of standard features expected by users in these industries. "The LCC oven redefines the standard for clean process ovens," said Hans Melgaard, vice president of research and development, Despatch.

Larger chamber volume
Designed to meet ever-increasing process demands in both the electronics and semiconductor industries, the LCC oven has a chamber volume of 14 cubic feet, which is large enough to handle thermal processing applications for both 200 mm and 300 mm wafers.

The chamber also features a non-corrosive stainless steel interior. Continuously welded seams on the insulation side protect the work chamber from contamination and permit washing of the chamber without damaging the insulation.

The recirculated airflow is 100 percent HEPA (High Efficiency Particulate Air) filtered. A special Magnehelic(TM) gauge also monitors the HEPA filter pressure drop so users know when it's time to replace the filter.

SEMI S2 and CE compliance
The oven is SEMI S2 and CE compliant for universal acceptance and can be configured for multiple voltages and 50/60 hz. The oven also has a UL and C-UL listed open control panel with a lockable disconnect switch for easy servicing.

Additionally, the LCC oven features Despatch's programmable, microprocessor-based Protocol Plus(TM) controller, designed to make oven operation simple and flexible. Using Despatch's Protocol Manager(TM) software, controllers can be networked and connected to a host computer, allowing for centralized operation, monitoring, and data logging of an oven network.

Ergonomic design and small footprint
The LCC oven is designed to save valuable floor space, and all of the serviceable components are easily accessible for maximum efficiency. "With the LCC oven's design, users maximize usable floor space while maintaining ergonomically acceptable loading heights," Melgaard said.

Other standard features
The LCC oven is available in air or nitrogen atmosphere configurations and silicone free construction. Forced exhaust is standard on the air atmosphere units for rapid cool down, and cooling water is standard on the nitrogen atmosphere units. Also standard on the LCC oven is an electric door release and a programmable door lock, which prevents operators from opening the oven door when a cycle is in process.

Despatch Industries designs and manufactures a full line of tight tolerance, high performance clean process ovens. For more information on Despatch's LCC oven or other Despatch products, contact: Despatch Industries, 63 St. Anthony Pkwy., Minneapolis, MN 55418. Phone: 1-800-828-9903; fax: 952-469-4513; email: info@despatch.com; website: www.despatch.com.

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